Abstract:Broadband terahertz spectroscopy is a valuable analytical tool in science and a promising technology for industrial non-destructive, non-contact testing, e.g. thickness measurements of thin dielectric layers. Optoelectronic conversion using photomixers is a widespread approach for coherent terahertz spectroscopy. State-of-the-art spectrometers consist of discrete, fiber-based components, leading to complex and costly setups. In cost-sensitive applications, this prevents the use of these spectrometers. We developed a terahertz spectrometer based on a dedicated photonic integrated circuit and commercial electronic integrated circuits to overcome these limitations. The photonic subsystem can be connected to commercial tunable lasers and provides the optical signal processing to drive the photoconductive antennas. The electronic subsystem includes the required drivers, analog signal processing, and data acquisition. Combined, the system measures cm3 only. We compare both subsystems individually and as a whole to state-of-the-art lab equipment in terms of spectral performance and measurement speed. Due to the flexibility in measurement modes, the integrated system can be adapted to specific measurement tasks, e.g. 2.8 THz-wide spectra within 0.5 s for high-speed, or 3.6 THz bandwidth with >80 dB dynamic range in less than 3 minutes for high-precision. This is the first realization of a terahertz spectrometer based on photonic and electronic integration rivaling state-of-the-art and non-integrated commercial spectrometers. This approach paves the way for compact and economic terahertz systems, providing access to terahertz technology for cost-sensitive sectors in research and industry.

Online terahertz thickness determination of sub-wavelength layers at kilohertz measurement rates

Ultra-High Repetition Rate Terahertz Time-Domain Spectroscopy for Micrometer Layer Thickness Measurement

Highly accurate thickness measurement of multi-layered automotive paints using terahertz technology

300 GHz Vector Imaging System Based on Self-Mixing Detection

Terahertz-based Thickness Measurement of Multilayer Thin Film Using Sparse Representation

A New Method for Measuring Multilayer Thickness Using a Chromatic Confocal Sensor

Simultaneously Measuring Thickness, Density, Velocity and Attenuation of Thin Layers Using V(z,t) Data from Time-Resolved Acoustic Microscopy.

Simultaneous Thickness, Velocity, Density, and Attenuation Measurement of a Thin Layer by Time-Resolved Acoustic Microscopy

Terahertz single-scan extraction of the dynamic information in a layered deposition

THz-TDS Reflection Measurement of Coating Thicknesses at Non-Perpendicular Incidence: Experiment and Simulation

Simultaneous Measurement of Elastic Moduli, Attenuation, Density, and Thickness of a Layer by Ultrasonic Spectroscopy Using Point-Focus Transducer

Simultaneous Measurement of Local Longitudinal and Transverse Wave Velocities, Attenuation, Density, and Thickness of Films by Using Point-Focus Ultrasonic Spectroscopy

In-Situ Thickness Measurement of Thin Deposited Layer on the Silicon Wafer Using Multi-Reflected Terahertz Electro-Magnetic Wave

Double-modulation reflection-type terahertz ellipsometer for measuring the thickness of a thin paint coating.

Non-destructive thickness measurement of thermal barrier coatings using terahertz radiation

Terahertz Based Thickness Measurement of Thermal Barrier Coatings Using Long Short-Term Memory Networks and Local Extrema

Physics-Based Deep Learning Framework for Terahertz Thickness Measurement of Thermal Barrier Coatings

THz time-domain spectroscopic investigations of thin films

A novel homomorphic processing of ultrasonic echoes for layer thickness measurement

Miniaturized Continuous-Wave Terahertz Spectrometer With 3.6 THz Bandwidth Enabled by Photonic Integration and Microelectronics

Stratified dispersive model for material characterization using terahertz time-domain spectroscopy