Efficient Determination of Copper Electroplating Chemistry Additives

Charles D. Ellis,Michael C. Hamilton,James R. Nakamura,Bogdan M. Wilamowski
DOI: https://doi.org/10.1109/tcpmt.2014.2325941
2014-08-01
Abstract:Determination of copper electroplating additives is critical to ensuring consistent copper plating of conductors and through-silicon-vias used in semiconductor processing and electronics packaging. The present analysis methods require many chemical analysis steps, generate waste, and are not very accurate. A new set of analysis methods utilizes a reduced number of steps and along with the use artificial neural networks (NNs) overcomes the present limitations, and provides an accurate and ecologically green analysis procedure. Using a newly developed second-order NN algorithm called neuron-by-neuron analysis, accuracies less than 1% have been realized. A step-by-step procedure to implement this method is provided.
engineering, manufacturing, electrical & electronic,materials science, multidisciplinary
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