Growth mechanism of [100]-oriented TaON film through an endotaxial transformation from a (012)-LiTaO 3 single crystal substrate

Xuesen Qin,Huiliang Li,Zeyan Wang,Zhaoke Zheng,Peng Wang,Hefeng Cheng,Yuanyuan Liu,Yuchen Fan,Ying Dai,Baibiao Huang
DOI: https://doi.org/10.1039/d3ce00114h
IF: 3.756
2023-01-01
CrystEngComm
Abstract:An endotaxial transformation growth mechanism has been proposed, which enables the successful fabrication of [100]-oriented free-standing TaON film from a (012)-LiTaO 3 single crystal substrate through a CCl 4 -assisted nitridation process.
chemistry, multidisciplinary,crystallography
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