A Fast and Strong Microactuator Powered by Internal Combustion of Hydrogen and Oxygen

Ilia V. Uvarov,Pavel S. Shlepakov,Vitaly B. Svetovoy

DOI: https://doi.org/10.1002/admt.202400690

IF: 6.8

2024-07-19

Advanced Materials Technologies

Abstract:A microactuator is demonstrated that generates a force of up to 0.5 Newton by internal combustion of hydrogen and oxygen in a microbubble, whose volume increases 500× only for 10 microseconds. The actuator can move bodies 11 000× more massive than itself and can be used as a build‐in engine for many microdevices. The development of fast and strong microactuators that can be integrated in microdevices is an essential challenge due to a lack of appropriate driving principles. A membrane actuator powered by internal combustion of hydrogen and oxygen in a chamber with a volume of 3.1 nanoliters is demonstrated. The combustion in such a small volume is possible only for an extremely high surface‐to‐volume ratio on the order of 107 m−1. The fuel with this ratio is prepared electrochemically in a special regime that produces only nanobubbles. A cloud of nanobubbles merges, forming a microbubble, which explodes, increasing the volume 500× in 10 μs. The actuator generates an instantaneous force up to 0.5 N and is able to move bodies 11 000× more massive than itself. The natural response time of ≈10 ms is defined by the incubation time needed to produce an exploding bubble. The device demonstrates reliable cyclic actuation at a frequency of 1 Hz restricted by the effect of electrolyte aging. After 40 000 explosions, no significant wear in the chamber is observed. Due to a record‐breaking acceleration and standard microfabrication techniques, the actuator can be used as a universal engine for various microdevices including microelectromechanical systems, microfluidics, microrobotics, wearable and implantable devices.

materials science, multidisciplinary