A fast and strong microactuator powered by internal combustion of hydrogen and oxygen

Ilia Uvarov,Pavel Shlepakov,Vitaly Svetovoy

DOI: https://doi.org/10.1002/admt.202400690

2024-08-06

Abstract:The development of fast and strong microactuators that can be integrated in microdevices is an essential challenge due to a lack of appropriate driving principles. In this paper, a membrane actuator powered by internal combustion of hydrogen and oxygen in a chamber with a volume of 3.1 nanoliters is demonstrated. The combustion in such a small volume is possible only for an extremely high surface-to-volume (S/V) ratio on the order of 10^7 1/m. The fuel with this S/V is prepared electrochemically in a special regime that produces only nanobubbles. A cloud of nanobubbles merges, forming a microbubble, which explodes, increasing the volume 500 times in 10us. The actuator generates an instantaneous force up to 0.5N and is able to move a body 11,000 times more massive than itself. The natural response time of about 10ms is defined by the incubation time needed to produce an exploding bubble. The device demonstrates reliable cyclic actuation at a frequency of 1Hz restricted by the effect of electrolyte aging. After 40,000 explosions, no significant wear in the chamber is observed. Due to record-breaking acceleration and standard microfabrication techniques, the actuator can be used as a universal engine for various microdevices including micro-electro-mechanical systems, microfluidics, microrobotics, wearable and implantable devices.

Applied Physics

What problem does this paper attempt to address?

The paper aims to address the challenges faced by micro-actuators in micro-device integration, particularly the search for sufficiently powerful and fast small actuators. The authors propose a membrane actuator based on internal hydrogen-oxygen combustion, capable of achieving rapid and powerful output within an extremely small volume (3.1 nanoliters).

The main contributions include:
1. **Small Internal Combustion Engine**: By performing internal hydrogen-oxygen combustion within nanobubbles (NBs), the goal of constructing an internal combustion engine on a microscopic scale is achieved.
2. **High Surface-to-Volume Ratio**: To support combustion within such a small volume, an extremely high surface-to-volume ratio (S/V) is required, which is achieved by generating nanobubbles through electrochemical methods.
3. **Fast Response and Powerful Output**: The actuator can expand its volume by 500 times within 10 microseconds and generate an instantaneous force of up to 0.5 Newtons, sufficient to move objects thousands of times its own mass.
4. **Reliable Cyclic Operation**: The device demonstrates reliable cyclic actuation capability at a frequency of 1 Hz, with no significant wear even after 40,000 explosions.
5. **Compatibility and Application Prospects**: Due to the use of standard microfabrication techniques, this actuator can be easily integrated into various microsystems, such as microelectromechanical systems (MEMS), microfluidic systems, microrobots, etc.

In summary, this paper presents a novel micro-actuator design that utilizes the explosive force generated by internal hydrogen-oxygen combustion as the driving principle, overcoming the limitations of traditional micro-actuators in terms of size, power, and speed.