Special Issue: "Micro/Nano Manufacturing Processes: Theories and Optimization Techniques"

Zejia Zhao,Guoqing Zhang,Wai Sze Yip

DOI: https://doi.org/10.3390/pr12081746

IF: 3.5

2024-08-22

Processes

Abstract:Manufacturing at the micro/nano scale creates many opportunities to fabricate micro- and nanostructures or to manufacture high-precision components, which has attracted considerable attention in fields such as optics [...]

engineering, chemical

What problem does this paper attempt to address?

Review of Fundamental Theories, Technologies and Key Applications on Micro and Nano-Photonics

Xiaocong Yuan,Siyuan Yu,Hongbo Sun,Wanhua Zheng,Min Qiu,Ya Chen,Limin Tong,Yidong Huang,Linsen Chen,Liangsheng Liao,Yunfeng Xiao,Haitao Liu,Zhaohui Li,Qing Pan,Jie He,Zhaotian Zhang,Yuwen Qin

DOI: https://doi.org/10.3969/j.issn.1009-2412.2015.03.003

2015-01-01

Abstract:Micro-and nano-photonics are advanced research topics of the 21st century right in the center of attention of the world's major developed countries, and will have significant and far-reaching impact on the future high-tech, national security, green energy and other areas. In recent years, the United States, European Union and other developed countries and regions have set up many major research plans for Micro and nano-photonics. Chinese scientists have also called on the government to establish relevant research programs to strengthen and improve the micro-and nano-photonics research in Chi-na.Micro-and nano-photonics combine the advanced research results of photonics and nano-technology, and is an indispensable science and technology discipline of the 21st century.Chinese scientists have achieved sig-nificant amounts of world-class research results in this field.In order to further investigate the impact of funda-mental theories and related key applications of Micro-and nano-photonics on the national economy in terms of advanced manufacturing and strategic resources, the Departments of Information Sciences, Mathematical and Physical Sciences, Engineering Material Sciences, and the Policy Bureau of National Natural Science Founda-tion of China ( NSFC ) co-sponsored the 115 “Shuan-gqing forum”on“Micro-and nano-photonics”.38 scien-tists from 26 institutes and universities participate in this forum. Through in-depth discussions, the scientists summarized the key scientific problems in this field and explored the forefront research topics and funding strate-gy.A review on the forums is published in this special issue.
Editorial for the Special Issue on Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability

Stelios K. Georgantzinos

DOI: https://doi.org/10.3390/mi14020253

IF: 3.4

2023-01-20

Micromachines

Abstract:The advancement of fundamental sciences in recent decades has led to an increased focus on the prediction of phenomena occurring at the micro and nano scales. Micro- and nanostructures have a wide range of applications in various fields, such as aerospace and automobiles, and are widely used in nano- and micro-sized systems and devices, such as biosensors, nanoactuators, and nanoprobes. The design of these structures relies on a complete understanding of their physical and mechanical behaviors. Mechanics plays a crucial role at the micro- and nanoscales, from the generation of nanostructures to the properties of nanocomposite materials and the manufacturing and design of machines, structures, sensors, actuators, fluidics, and more. This Special Issue aims to bring together high-quality papers that advance the field of micro- and nanostructures and systems through the use of modern computational and analytical methods, in conjunction with experimental techniques, for their analysis, design, manufacture, maintenance, quality, and reliability.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Editorial for the Special Issue on Micro/Nano-Structure Based Optoelectronics and Photonics Devices

Zhiyong Wu,Lu Zhu,Zhengji Xu

DOI: https://doi.org/10.3390/mi14101867

IF: 3.4

2023-09-30

Micromachines

Abstract:In the ever-evolving fields of optoelectronics and photonics, the introduction of carefully designed micro-/nanostructures enables personalized customization of the electrical and optical properties of optoelectronic and photonic devices [...]

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Femtosecond Laser Micro/Nano-manufacturing: Theories, Measurements, Methods, and Applications

Baoshan Guo,Jingya Sun,Yanhong Hua,Ningwei Zhan,Jingang Jia,Kunpeng Chu

DOI: https://doi.org/10.1007/s41871-020-00056-5

2020-02-28

Nanomanufacturing and Metrology

Abstract:Abstract Femtosecond laser fabrication has grown to be a major method of extreme manufacturing because of the extreme energy density and spatial and temporal scales of femtosecond lasers. The physical effects and the mechanism of interaction between femtosecond lasers and materials are distinct from those in traditional processes. The nonlinear and nonequilibrium effects of the interaction have given rise to new concepts, principles, and methods, such as femtosecond pulse durations are shorter than many physical/chemical characteristic times, which permits manipulating, adjusting, or interfering with electron dynamics. These new concepts and methods have broad application prospects in micro/nanofabrication, chemical synthesis, material processing, quantum control, and other related fields. This review discusses the cutting-edge theories, methods, measurements, and applications of femtosecond lasers to micro/nano-manufacturing. The key to future development of femtosecond laser manufacturing lies in revealing its fabrication mechanism from the electronic level and precisely regulating the electronic dynamics.
Recent Development in Micromanufacturing of Metallic Materials

Jingwei Zhao,Zhengyi Jiang,Leszek A. Dobrzański,Chong Soo Lee,Fuxiao Yu

DOI: https://doi.org/10.3390/ma13184046

IF: 3.4

2020-09-11

Materials

Abstract:Product miniaturization is a trend for facilitating product usage, enabling product functions to be implemented in microscale geometries, and aimed at reducing product weight, volume, cost and pollution. Driven by ongoing miniaturization in diverse areas including medical devices, precision equipment, communication devices, micro-electromechanical systems (MEMS) and microsystems technology (MST), the demands for micro metallic products have increased tremendously. Such a trend requires development of advanced micromanufacturing technology of metallic materials for producing high-quality micro metallic products that possess excellent dimensional tolerances, required mechanical properties and improved surface quality. Micromanufacturing differs from conventional manufacturing technology in terms of materials, processes, tools, and machines and equipment, due to the miniaturization nature of the whole micromanufacturing system, which challenges the rapid development of micromanufacturing technology. Against such a background, the Special Issue “Micromanufacturing of Metallic Materials” was proposed to present the recent developments of micromanufacturing technologies of metallic materials. The papers collected in the Special Issue include research articles, literature review and technical notes, which have been highlighted in this editorial.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures

Bingheng Lu,Jianbin Luo,Tian Zhang,Dongming Guo,Han Ding,Changzhi Gu,Zhihong Li,Min Liu

DOI: https://doi.org/10.1007/978-981-19-8975-9_4

2023-01-01

Abstract:Nanotechnology is widely used in many fields such as information, optoelectronics, materials, environment, energy, biology, medicine and national defense security. Nanostructure is the functional carrier of almost all nano devices/products/systems, and its forming principle and method are one of the research focuses of nanomanufacturing. Taking a planar lens as an example, a lens with a thickness of only 1 μm can focus all kinds of light waves of any polarization state at one point, and its imaging performance is equivalent to that of a first-class complex lens system. The functional carrier of planar lens is its nanostructure, which is mainly characterized by “super pixel” structure with characteristic scale below tens of nanometers; nanostructured materials are functional materials, such as photoelectric materials like TiO2; the scale of device or system level can reach more than tens of millimeters, ensuring large format consistency and morphology accuracy.
Editorial for the Special Issue on Optics and Photonics in Micromachines

Cuifang Kuang,Wei Zhao

DOI: https://doi.org/10.3390/mi14061102

IF: 3.4

2023-05-24

Micromachines

Abstract:Micromachines, as a platform for manipulation, assembling, detection and imaging, is a typical interdisciplinary field related to broad areas, e [...]

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Parallel Fabrication of Silica Optical Microfibers and Nanofibers

Hubiao Fang,Yu Xie,Zipei Yuan,Dawei Cai,Jianbin Zhang,Xin Guo,Limin Tong

DOI: https://doi.org/10.37188/lam.2024.020

2024-01-01

Abstract:Optical micro/nanofibers (MNFs) taper-drawn from silica fibers possess intriguing optical and mechanical properties. Recently, MNF array or MNFs with identical geometries have been attracting more and more attention, however, current fabrication technique can draw only one MNF at a time, with a low drawing speed (typically 0.1 mm/s) and a complicated process for high-precision control, making it inefficient in fabricating multiple MNFs. Here, we propose a parallel-fabrication approach to simultaneously drawing multiple (up to 20) MNFs with almost identical geometries. For fiber diameter larger than 500 nm, measured optical transmittances of all as-drawn MNFs exceed 96.7% at 1550-nm wavelength, with a diameter deviation within 5%. Our results pave a way towards high-yield fabrication of MNFs that may find applications from MNF-based optical sensors, optical manipulation to fiber-to-chip interconnection.
Recent Progress on Optical Micro/Nanomanipulations: Structured Forces, Structured Particles, and Synergetic Applications

Lei-Ming Zhou,Yuzhi Shi,Xiaoyu Zhu,Guangwei Hu,Guangtao Cao,Jigang Hu,Cheng-Wei Qiu

DOI: https://doi.org/10.1021/acsnano.2c05634

IF: 17.1

2022-09-03

ACS Nano

Abstract:Optical manipulation has achieved great success in the fields of biology, micro/nano robotics and physical sciences in the past few decades. To date, the optical manipulation is still witnessing substantial progress powered by the growing accessibility of the complex light field, advanced nanofabrication and developed understandings of light-matter interactions. In this perspective, we highlight recent advancements of optical micro/nanomanipulations in cutting-edge applications, which can be...

materials science, multidisciplinary,chemistry, physical,nanoscience & nanotechnology
Chemical Nano——engineering Fundamentals and Prospects

ZHAO Jianwei

DOI: https://doi.org/10.3969/j.issn.1006-6055.2008.01.003

2008-01-01

Abstract:Traditional mechanics relays on the continuum theory,but chemistry is characterized by treating individual chemical bonds.The ultra-fine machining has reached nano-scales nowadays.One important problem countered is the discrete states of the piece when it is reduced to nano-size.Due to the intrinsic nature of the nano-materials,the fundamentals of the micro/nano manufacturing are experiencing changes from quantitative to qualitative along with the decreasing of the size of the machining object.In the nanometer scale,the crossover of conventional mechanics and physical chemistry has resulted in a new discipline——chemical nano-engineering.Fundamental research on this field is of great importance for improving the advanced manufacturing technology,further increasing the country's initial competitive force.
The Fabrication of Micro/Nano Structures by Laser Machining

Liangliang Yang,Jiangtao Wei,Zhe Ma,Peishuai Song,Jing Ma,Yongqiang Zhao,Zhen Huang,Mingliang Zhang,Fuhua Yang,Xiaodong Wang

DOI: https://doi.org/10.3390/nano9121789

IF: 5.3

2019-12-16

Nanomaterials

Abstract:Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology,chemistry
Editorial for the Special Issue on Advances in Micro and Nano Manufacturing: Process Modeling and Applications, Volume II

Davide Masato

DOI: https://doi.org/10.3390/mi15060687

IF: 3.4

2024-05-24

Micromachines

Abstract:In the second volume of the Special Issue on 'Advances in Micro and Nano Manufacturing: Process Modeling and Applications', we continue to witness the dynamic evolution of micro- and nanomanufacturing technologies [...]

nanoscience & nanotechnology,instruments & instrumentation,physics, applied,chemistry, analytical
Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring

Xiaomeng Yang,Ruiqi Song,Liang He,Leixin Wu,Xin He,Xiaoyu Liu,Hui Tang,Xiaolong Lu,Zeyu Ma,Peng Tian

DOI: https://doi.org/10.1039/d2ra05148f

IF: 4.036

2022-12-10

RSC Advances

Abstract:Three-dimensional (3D) micro/nano structures are significant in many applications because of their novel multi-functions and potential in high integration. As is known, the traditional methods for the processing of 3D micro/nano structures exhibit disadvantages in mass production and machining precision. Alternatively, ultrafast laser machining, as a rapid and high-power-density processing method, exhibits advantages in 3D micro/nano structuring due to its characteristics of extremely high peak power and ultra-short pulse. With the development of ultrafast laser processing for fine and complex structures, it is attracting significant interest and showing great potential in the manufacture of 3D micro/nano structures. In this review, we introduce the optimization mechanism of ultrafast laser machining in detail, such as the optimization of the repetition rate and pulse energy of the laser. Furthermore, the specific applications of 3D micro/nano structures by laser processing in the optical, electrochemical and biomedical fields are elaborated, and a valuable summary and perspective of 3D micro/nano manufacturing in these fields are provided.

chemistry, multidisciplinary
Editorial for the Special Issue on Ultra Precision Technologies for Micromachining, Volume II

Yukui Cai,Xichun Luo,Jining Sun,Wenlong Chang

DOI: https://doi.org/10.3390/mi13111975

2022-11-15

Abstract:With the increasing demand for ultra-high-precision products and micro-products in fields such as aerospace, national defense, military, transportation, and people's livelihoods, it has become an important development trend in the field of machining to realize ultra-high-precision machining and miniaturization with a higher level and higher quality [...].
Advances in micro milling: From tool fabrication to process outcomes

Ni Chen,Hao Nan Li,Jinming Wu,Zhenjun Li,Liang Li,Gongyu Liu,Ning He

DOI: https://doi.org/10.1016/j.ijmachtools.2020.103670

IF: 10.331

2021-01-01

International Journal of Machine Tools and Manufacture

Abstract:<p>Micro milling cutters or micro mills are unique and important micro tools for fabricating miniaturised devices with sufficient geometrical and dimensional accuracy and machined surface integrity. Micro milling cutters, compared to conventional macro tools, have significantly different material removal mechanisms. They are also made of different raw materials and structures and exhibit distinctive machining characteristics and performances. Herein, we present the first comprehensive and up-to-date review of micro milling cutters in terms of their uniqueness, material removal mechanisms, materials and compositions, structures and design, fabrication techniques and machining performances, to provide adequate guidance for interested involvers. We also outline and discuss several possible future research directions to offer potential insights for the micro milling community and future researchers.</p>

engineering, mechanical, manufacturing
Micro- and Nano-Mechanics in China: A Brief Review of Recent Progress and Perspectives

ZhiPing Xu,QuanShui Zheng

DOI: https://doi.org/10.1007/s11433-018-9204-6

2018-01-01

Abstract:The past three decades have witnessed the explosion of nanoscience and technology, where notable research efforts have been made in synthesizing nanomaterials and controlling nanostructures of bulk materials. The uncovered mechanical behaviors of structures and materials with reduced sizes and dimensions pose open questions to the community of mechanicians, which expand the framework of continuum mechanics by advancing the theory, as well as modeling and experimental tools. Researchers in China have been actively involved into this exciting area, making remarkable contributions to the understanding of nanoscale mechanical processes, the development of multi-scale, multi-field modeling and experimental techniques to resolve the processing-microstructures-properties relationship of materials, and the interdisciplinary studies that broaden the subjects of mechanics. This article reviews selected progress made by this community, with the aim to clarify the key concepts, methods and applications of micro- and nano-mechanics, and to outline the perspectives in this fast-evolving field.
Additive, subtractive and formative manufacturing of glass-based functional micro/nanostructures: a comprehensive review

Hong Luo,Yingying Zhang,Jianwu Yu,Xinran Dong,Tianfeng Zhou

DOI: https://doi.org/10.1016/j.matdes.2023.112285

2023-08-31

Abstract:The ever-increasing demands for miniature integrated optics, mechanics, electronics, and biofluidics have generated great interest in high-performance glass components featuring functional micro/nanostructures. Focusing on micro/nanostructuring of optical glass, many landmark processing techniques have been developed. However, due to notable differences in the capabilities of these techniques, researchers often encounter difficulties in selecting the appropriate glass feedstock or determining the optimal/complementary strategy for achieving a specific production task with desired resolution, accuracy, and efficiency. To shed light on potential solutions, this paper presents a state-of-the-art review that covers subtractive, additive, and formative manufacturing of functional micro/nanostructures using the broadest forms of glass feedstocks (including blocks, powders, and precursors). Initiating with a complete technical classification, the fundamentals, developments, and recent breakthroughs in micro/nanostructuring of glass are comprehensively outlined. Subsequently, the essential features (including spatial resolution, surface finish, accuracy, and efficiency) of the collected glass micro/nanomanufacturing techniques are comparatively evaluated, followed by detailed discussions of their capabilities and current challenges. Finally, future prospects are summarized to highlight potential opportunities and directions in glass micro/nanofabrication. This review will offer a panoramic guideline to the selection and innovation of glass materials and processing strategies for application-oriented precision and efficient manufacturing of diverse glass-based functional micro/nanostructures.

materials science, multidisciplinary
Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Chen, Qi-Dai,Xia, Hong,Yong-Lai Zhang,Sun, Hong-Bo

DOI: https://doi.org/10.1109/cleoe.2011.5943341

2011-01-01

Abstract:Femtosecond laser micronanofabrication has been considered as a promising approach for complicated device fabrication in versatile fields due to its intrinsic three-dimensional (3D) prototyping capability and reasonably high fabrication accuracy up to tens of nanometers. However, the unique features haven't been fully demonstrated yet so far. Our research in the passed several years has been focused in exploring applications of delicate technology in micro-optics, microelectronics, micromachines and microfluidics. Significant progress has been achieved. Successful examples include but not limited to aspheric microlens arrays with 100% filling ratio and numerical aperture as high as 0.5, nonplanar metal nanowiring technology, flexible circuits of graphene, remotely magnetically controllable micromachine, and microfilter and microturbines for microfluidic channels. Details on the fabrication and characterizations on these devices will be presented.
Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Zhenyuan Lin,Minghui Hong

DOI: https://doi.org/10.34133/2021/9783514

2021-12-01

Ultrafast Science

Abstract:As a noncontact strategy with flexible tools and high efficiency, laser precision engineering is a significant advanced processing way for high-quality micro-/nanostructure fabrication, especially to achieve novel functional photoelectric structures and devices. For the microscale creation, several femtosecond laser fabrication methods, including multiphoton absorption, laser-induced plasma-assisted ablation, and incubation effect have been developed. Meanwhile, the femtosecond laser can be combined with microlens arrays and interference lithography techniques to achieve the structures in submicron scales. Down to nanoscale feature sizes, advanced processing strategies, such as near-field scanning optical microscope, atomic force microscope, and microsphere, are applied in femtosecond laser processing and the minimum nanostructure creation has been pushed down to ~25 nm due to near-field effect. The most fascinating femtosecond laser precision engineering is the possibility of large-area, high-throughput, and far-field nanofabrication. In combination with special strategies, including dual femtosecond laser beam irradiation, ~15 nm nanostructuring can be achieved directly on silicon surfaces in far field and in ambient air. The challenges and perspectives in the femtosecond laser precision engineering are also discussed.
Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large-Scale Fabrication, and Performance Optimization

Zeyu Ma,Wenwu Wang,Yibo Xiong,Yihao Long,Qi Shao,Leixin Wu,Jiangwang Wang,Peng Tian,Arif Ullah Khan,Wenhao Yang,Yixiao Dong,Hongbo Yin,Hui Tang,Jun Dai,Muhammad Tahir,Xiaoyu Liu,Liang He

DOI: https://doi.org/10.1002/smll.202400179

IF: 13.3

2024-07-19

Small

Abstract:With the rapid development of micro/nano machining, there is an elevated demand for high-performance microdevices with high reliability and low cost. Due to their outstanding electrochemical, optical, electrical, and mechanical performance, carbon materials are extensively utilized in constructing microdevices for energy storage, sensing, and optoelectronics. Carbon micro/nano machining is fundamental in carbon-based intelligent microelectronics, multifunctional integrated microsystems, high-reliability portable/wearable consumer electronics, and portable medical diagnostic systems. Despite numerous reviews on carbon materials, a comprehensive overview is lacking that systematically encapsulates the development of high-performance microdevices based on carbon micro/nano structures, from structural design to manufacturing strategies and specific applications. This review focuses on the latest progress in carbon micro/nano machining toward miniaturized device, including structural engineering, large-scale fabrication, and performance optimization. Especially, the review targets an in-depth evaluation of carbon-based micro energy storage devices, microsensors, microactuators, miniaturized photoresponsive and electromagnetic interference shielding devices. Moreover, it highlights the challenges and opportunities in the large-scale manufacturing of carbon-based microdevices, aiming to spark further exciting research directions and application prospectives.

Special Issue: "Micro/Nano Manufacturing Processes: Theories and Optimization Techniques"

Review of Fundamental Theories, Technologies and Key Applications on Micro and Nano-Photonics

Editorial for the Special Issue on Micro/Nano Structures and Systems: Analysis, Design, Manufacturing, and Reliability

Editorial for the Special Issue on Micro/Nano-Structure Based Optoelectronics and Photonics Devices

Femtosecond Laser Micro/Nano-manufacturing: Theories, Measurements, Methods, and Applications

Recent Development in Micromanufacturing of Metallic Materials

Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures

Editorial for the Special Issue on Optics and Photonics in Micromachines

Parallel Fabrication of Silica Optical Microfibers and Nanofibers

Recent Progress on Optical Micro/Nanomanipulations: Structured Forces, Structured Particles, and Synergetic Applications

Chemical Nano——engineering Fundamentals and Prospects

The Fabrication of Micro/Nano Structures by Laser Machining

Editorial for the Special Issue on Advances in Micro and Nano Manufacturing: Process Modeling and Applications, Volume II

Optimization mechanism and applications of ultrafast laser machining towards highly designable 3D micro/nano structuring

Editorial for the Special Issue on Ultra Precision Technologies for Micromachining, Volume II

Advances in micro milling: From tool fabrication to process outcomes

Micro- and Nano-Mechanics in China: A Brief Review of Recent Progress and Perspectives

Additive, subtractive and formative manufacturing of glass-based functional micro/nanostructures: a comprehensive review

Laser Nanofabrication: Applications in Micro-Optics, Micro-Electronics, Micromachines, and Microfluidics

Femtosecond Laser Precision Engineering: From Micron, Submicron, to Nanoscale

Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large-Scale Fabrication, and Performance Optimization