Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures

Bingheng Lu,Jianbin Luo,Tian Zhang,Dongming Guo,Han Ding,Changzhi Gu,Zhihong Li,Min Liu
DOI: https://doi.org/10.1007/978-981-19-8975-9_4
2023-01-01
Abstract:Nanotechnology is widely used in many fields such as information, optoelectronics, materials, environment, energy, biology, medicine and national defense security. Nanostructure is the functional carrier of almost all nano devices/products/systems, and its forming principle and method are one of the research focuses of nanomanufacturing. Taking a planar lens as an example, a lens with a thickness of only 1 μm can focus all kinds of light waves of any polarization state at one point, and its imaging performance is equivalent to that of a first-class complex lens system. The functional carrier of planar lens is its nanostructure, which is mainly characterized by “super pixel” structure with characteristic scale below tens of nanometers; nanostructured materials are functional materials, such as photoelectric materials like TiO2; the scale of device or system level can reach more than tens of millimeters, ensuring large format consistency and morphology accuracy.
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