Abstract:A seamless chip-to-world photonic interface enables wide-ranging advancements in optical ranging, display, communication, computation, imaging, and light-matter interaction. An optimal solution allows for 2D scanning of a diffraction-limited beam from anywhere on a photonic chip over a large number of beam-spots in free-space. Currently, devices with direct PIC integration rely on tiled apertures with poor mode qualities, large footprints, and complex control systems. Micro-mechanical beam scanners have good beam quality but lack direct PIC integration and are inertially-limited due to the use of bulk optical components or structures in which the optical aperture and actuator sizes are inextricably linked, resulting in trade-offs among resolution, speed, and footprint. Here, we overcome these limitations with the photonic "ski-jump": a nanoscale optical waveguide monolithically integrated atop a piezoelectrically actuated cantilever which passively curls ~90$^{\circ}$ out-of-plane in a footprint of <0.1 mm$^{2}$, emits sub-micron diffraction-limited optical modes, and exhibits kHz-rate mechanical resonances with quality factors exceeding 10,000. This enables two-dimensional beam-scanning with footprint-adjusted spot-rates of 68.6 mega-spots/(s$\cdot$mm$^{2}$) at CMOS-level voltages, which is equivalent to a 1 megapixel display at 100 Hz from a 1.5 mm$^{2}$ footprint, and exceeds the performance of state-of-the-art MEMS mirrors by >50$\times$. Using this device, we demonstrate image projection, video projection, and the initialization and readout of single photons from silicon vacancy centers in diamond waveguides. Based on current performance, we identify pathways for achieving >1 giga-spots at kHz-rates in a ~1 cm$^{2}$ area to provide a seamless, scalable optical pipeline between integrated photonic processors and the free-space world.

3D-Nanoprinted Antiresonant Hollow-Core Microgap Waveguide: An on-Chip Platform for Integrated Photonic Devices and Sensors

On-Chip Integration of Optical Nanofibers and Nanowires

3D-nanoprinted on-chip antiresonant waveguide with hollow core and microgaps for integrated optofluidic spectroscopy

Free-standing millimeter-range 3D waveguides for on-chip optical interconnects

Fiber-integrated hollow-core light cage for gas spectroscopy

Waveguides Used for Nano- Photonic Circuits

Characterization of Planar Hybrid Dielectric-Loaded Plasmonic Nano-Waveguides Used for Nano-Photonic Circuits

Ultrasmall-V High-Q Photonic Crystal Nanobeam Microcavities Based on Slot and Hollow-Core Waveguides

3D nano-printing coupler for silicon nitride suspended waveguide

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Vertical optical ring resonators fully integrated with nanophotonic waveguides on silicon-on-insulator substrates

Low loss hollow-core waveguide on a silicon substrate

Ultra-Low Loss, Chip-Based Hollow-Core Waveguide Using High-Contrast Grating

3D-Printed Optics for Wafer-Scale Probing

Photonic Chiplet Interconnection via 3D-Nanoprinted Interposer

Coupling Nanowire Quantum Dots to Optical Waveguides by Microsphere-Induced Photonic Nanojet

Ultrafast Laser Written Waveguide Chips for Quantum Applications

3D-Printed Terahertz Topological Waveguides

Nanophotonic waveguide chip-to-free-space beam scanning at 68 Million Spots/(s$\cdot$mm$^{2}$)

All-dielectric Meta-Waveguides for On-Chip Integration

Sensors: On‐Chip Spiral Waveguides for Ultrasensitive and Rapid Detection of Nanoscale Objects (adv. Mater. 25/2018)