Abstract:Abstract The feasible resolution of angular displacement measurement by an optical angle sensor based on laser autocollimation is investigated. Improving the sensor sensitivity while maintaining the noise level of the sensor signal as low as possible is necessary to achieve high-resolution angular displacement measurement. In this paper, the contribution of each component, such as a photodiode, a trans-impedance amplifier, and an analog-to-digital converter in the optical angle sensor, to the noise level of the sensor signal is first estimated on the basis of theoretical equations. The feasible sensitivity of the optical angle sensor is also estimated in numerical calculations. The sensitivity of a photodiode element at the edge of its photosensitive area is evaluated in experiments to realize the estimation of the angle sensor sensitivity. Experimental results are applied to the numerical calculations. The influences of the measurement laser beam diameter, the spot diameter of the focused laser beam on the photosensitive area, and the focal length of the collimator objective of the optical angle sensor are also considered in the numerical calculations. Finally, a prototype optical setup is developed. Experiments are performed to demonstrate that a compact optical angle sensor based on laser autocollimation with a collimator objective having a focal length shorter than 100 mm can achieve a resolution beyond 0.001 arc-second with a bandwidth of 1 kHz. This resolution is better than those achieved by commercial autocollimators employing an image sensor or a position-sensitive detector. The industrial contribution of this paper lies in the detailed breakdown of noise components in the readout signal of an angle sensor in a practical condition and the systematic estimation of its feasible resolution as well as its sensitivity.

A Precision Angle Sensor using an Optical Lever inside a Sagnac Interferometer

Research on high-speed and non-contact angle detection based on laser measurement

Ultra-sensitive angle sensor based on laser autocollimation for measurement of stage tilt motions

Ultra-precision angle sensor with a mode-locked laser source

An optical lever by using a mode-locked laser for angle measurement

Optical Acceleration Measurement Method with Large Non-ambiguity Range and High Resolution Via Synthetic Wavelength and Single Wavelength Superheterodyne Interferometry

1506 Determination of the origin position for an angle sensor with a femtosecond laser

A Laser Walk-off Sensor for High-Precision Low-Frequency Rotation Measurements.

Single Chip-Based Nano-Optomechanical Accelerometer Based on Subwavelength Grating Pair and Rotated Serpentine Springs

Determination of the Zero-Position for an Optical Angle Sensor

Compact Instantaneous Phase-Shifting Sagnac Interferometer for Nanoscale Tilt Measurement

Quantum-limited optical lever measurement of a torsion oscillator

Single-Element Dual-Interferometer for Precision Inertial Sensing: Sub-picometer Structural Stability and Performance as a Reference for Laser Frequency Stabilization

Feasible Resolution of Angular Displacement Measurement by an Optical Angle Sensor Based on Laser Autocollimation

An Ultracompact Angular Displacement Sensor Based on the Talbot Effect of Optical Microgratings

Optomechanically Enhanced Precision Measurement

1/f Noise Mitigation in an Opto-Mechanical Sensor with a Fabry–Pérot Interferometer

Self-Aligning Optical MEMS Acoustic Sensors With nPa/√Hz Resolution

High Precision Inertial Sensors on a One Inch Diameter Optic

Two-dimensional angle measurement with sub-arcsecond precision and MHz update rate using heterodyne interferometry with optical frequency comb

Experimental demonstration of an angle laser sensor based on an optical thinned microfiber Mach-Zehnder interferometer