Stress-Dependent Optical Extinction in Low-Pressure Chemical Vapor Deposition Silicon Nitride Measured by Nanomechanical Photothermal Sensing

Kostas Kanellopulos,Robert G. West,Stefan Emminger,Paolo Martini,Markus Sauer,Annette Foelske,Silvan Schmid
DOI: https://doi.org/10.1021/acs.nanolett.4c02902
IF: 10.8
2024-09-03
Nano Letters
Abstract:Understanding optical absorption in silicon nitride is crucial for cutting-edge technologies like photonic integrated circuits, nanomechanical photothermal infrared sensing and spectroscopy, and cavity optomechanics. Yet, the origin of its strong dependence on the film deposition and fabrication process is not fully understood. This Letter leverages nanomechanical photothermal sensing to investigate optical extinction κ(ext) at a 632.8 nm wavelength in low-pressure chemical vapor deposition...
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
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