Abstract:Thin titanium oxide (TiO2) films were prepared through electron-beam evaporation of titanium metal on substrates followed by oxidizing and sintering at 600°C in flowing oxygen. The thicknesses of the as-deposit metal films were 25nm, 50nm and 100nm. The phase of the TiO2 converted from the thermal oxidation was detected to be rutile. Nanoporous anodized aluminum oxide (AAO) and plain thermal silicon oxide on top of a commercial silicon wafer were used as substrates to support the TiO2 thin layer. A pair of interdigit platinum electrodes with a spacing of 5μm was fabricated on the TiO2 thin films by photolithography. At 500°C, the samples showed different sensing behaviors to hydrogen concentration levels ranging from 5ppm to 500ppm, with nitrogen as the background gas. It was found that the sensitivity was significantly enhanced by the increased specific surface area of the TiO2 thin film due to the shaping of the porous AAO substrate. The performance of the sensor based on the TiO2 film converted from 25-nm-thick Ti on the porous AAO substrate, which has the largest specific surface area among all the other samples, was featured by a conductance change of 25–90 times and considerable resolution for 5ppm to 500ppm H2, as well as very fast response and recovery (the time delay to reach or retreat to half of the maximum stable signal, t50%, was always no more than 10s). The rutile-phased thin TiO2 film on AAO is proven to be a promising high-temperature hydrogen sensor with satisfactory performance, excellent durability, and ideal compatibility to micro-miniaturization.

Unprecedented ultra-high hydrogen gas sensitivity in undoped titania nanotubes

Extreme Changes in the Electrical Resistance of Titania Nanotubes with Hydrogen Exposure

Hydrogen sensing using titania nanotubes

Wide-range hydrogen sensing with Nb-doped TiO 2 nanotubes

Ultraviolet Detector with Ultrahigh Responsivity Based on Anatase TiO 2 Nanotubes Array Modified with (001) Exposed Nanofacets

Ni-doped TiO2 Nanotubes for Wide-Range Hydrogen Sensing

Extreme oxygen sensitivity of electronic properties of carbon nanotubes

Fabrication of Carbon-Nanotube Sheet Based Hydrogen Sensor

Hydrogen Sensing with Ni-Doped TiO2 Nanotubes

Fabrication and Hydrogen Sensing Properties of Titania Nanotubes

Descent of morphisms of overconvergent F-crystals

Highly Sensitive Hydrogen Sensor Based on a New Suspended Structure of Cross-Stacked Multiwall Carbon Nanotube Sheet

Extraordinary Room-Temperature Hydrogen Sensing Capabilities of Porous Bulk Pt–TiO2 Nanocomposite Ceramics

Reverse Bias Voltage Dependent Hydrogen Sensing Properties on Au–TiO2 Nanotubes Schottky Barrier Diodes

High-temperature Resistive Hydrogen Sensor Based on Thin Nanoporous Rutile TiO2 Film on Anodic Aluminum Oxide

Highly Sensitive Room-Temperature Hydrogen Sensor Based on Pd-functionalized Titania Nanotubes Prepared at Appropriate Electrolyte Temperature

Improving Hydrogen Sensing Performance of TiO2 Nanotube Arrays by ZnO Modification

Amorphous Tio(2) Nanotube Arrays For Low-Temperature Oxygen Sensors

Highly Sensitive Hydrogen Sensor Based on Pd-functionalized Titania Nanotubes Prepared in Water-Contained Electrolyte

Oxygen vacancy modulation of titania nanotubes by cathodic polarization and chemical reduction routes for efficient detection of volatile organic compounds

Uniformly dispersed Pt-Ni nanoparticles on nitrogen-doped carbon nanotubes for hydrogen sensing