Abstract:Metasurface-based optical elements enable abrupt wavefront engineering by locally controlling the properties (amplitude, phase, etc.) of the incident illumination. They hold great potential to promote a new generation of wearable devices and thin optical systems for imaging and sensing. To date, most of the existing metasurface designs rely on highaspect-ratio nanostructures, with a thickness close to or even higher than the wavelength. There has been an increasing demand to reduce the metasurface thickness and nanostructure aspect-ratio, in order to facilitate the fabrication compatibility and integration with electronics and dynamic tunable platforms. Here we demonstrate ultrathin (~ 1/5 of the wavelength) transmissive metalenses for the visible light, using two different approaches of either amplitude or phase modulation. For amplitude modulation, we developed a digital transmission coding scheme that allows manipulation of multiple wavelengths without increasing the thickness or complexity of the structural elements. In order to improve the optical efficiency, phase modulation is necessary, but the design is more challenging. Because the nanoresonators are electromagnetically coupled with each other, compared with high-aspect-ratio nanostructures with wave-guiding confinement. To solve this problem, we developed an inverse design strategy using machine learning. We employ evolutionary algorithms interfaced with Finite-Difference Time-Domain solvers, which not only mimic natural selection in order to determine the optimal arrangement of nanoresonators to achieve the desired target optical functions, but also consider and benefit from the strong interactions between nanoresonators to improve the performance. The machine learning designs significantly improve the focusing efficiency, approximately double of the conventional human designs.

Achieving Ultrawide Tunability in Monolithically Fabricated Si Nanoresonator Devices

Chip-based Wide-Field 3D Nanoscopy Through Tunable Spatial-Frequency-shift Effect

Chip-compatible wide-field 3D nanoscopy through tunable spatial frequency shift effect

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

Tuning the Resonance Properties of 2D Carbon Nanotube Networks Towards a Mechanical Resonator

Enhancing responsivity and detection limit in tunable nano-electromechanical system resonator mass sensors

Fano-resonance-based ultra-high-resolution ratio-metric wavelength monitor on silicon.

Electric Tuning of Plasmonic Resonances in Ultrathin Gold Nanoribbon Arrays

Integrated High-Performance Two-Stage Ratiometric Wavelength Monitors on Silicon

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Extraordinarily Large Optical Cross Section for Localized Single Nanoresonator.

Tunable Micro- and Nanomechanical Resonators

In-situ tuning of optomechanical crystals with nano-oxidation

Ultrathin metasurface for the visible light based on dielectric nanoresonators

Ultra-coherent nanomechanical resonators based on inverse design

Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI

Long nanomechanical resonators with circular cross-section

Nanomechanical Resonators: Toward Atomic Scale

Leveraging of MEMS Technologies for Optical Metamaterials Applications

The possibility of ultrasensitive detection of biomolecules using silicon nanowire biosensor with structural optimization