Abstract:3R‐MoS2 based solid mounted resonators with the resonant frequency up to 27 GHz and the electromechanical coupling coefficient ≈47.6% are demonstrated. Successful implantation of 2D piezoelectric 3R‐MoS2 flakes into acoustic resonators suggests that ultrathin 2D piezoelectric nanoflakes can break through the frequency limitation of conventional acoustic resonators. 2D piezoelectric materials can be promising for next generation acoustic devices. Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators (FBARs) are facing an insurmountable challenge for millimetric frequency applications due to the poor piezoelectric properties of the materials when their thickness reaches the sub‐micron regime. Novel FBARs for ultra‐high working frequencies are in urgent demand to meet the requirements of the fast‐growing 5/6G telecommunication techniques. Recent advances in 2D piezoelectric nanomaterials create an opportunity in this perspective. Here, the first FBAR chip based on 2D 3R‐MoS2 ultrathin piezoelectric flakes with a solidly mounted resonator (SMR) architecture is reported. The typical resonant frequency for an SMR device based on ≈200 nm 3R‐MoS2 flake reaches over 25 GHz with high reproducibility. Theoretical and finite element analysis suggest that the observed resonance is of longitudinal acoustic modes. This study demonstrates for the first time that the access to 2D piezoelectric nanomaterials makes high performance piezoelectric devices feasible for various promising applications including high‐speed telecommunication, acousto‐optic, and sensor fields,etc.

Piezoresistive silicon nanowire resonators as embedded building blocks in thick SOI

In-plane nanoelectromechanical resonators based on silicon nanowire piezoresistive detection

Highly-Sensitive Optical Biosensors Based on Silicon-On-Insulator Nanowire Waveguide

Electrical Actuation and Readout in a Nanoelectromechanical Resonator Based on a Laterally Suspended Zinc Oxide Nanowire

Fabrication of Silicon Nitride Membrane Nanoelectromechanical Resonator

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Bottom-up assembly of large-area nanowire resonator arrays

Nanowire in Photonic Crystal Visible Light Source

Multimode characteristics in mechanically-coupled silicon carbide (SiC) nanowire array resonators

High frequency mechanical excitation of a silicon nanostring with piezoelectric aluminum nitride layers

Fabrication-Robust Silicon Photonic Devices in Standard Sub-Micron Silicon-on-Insulator Processes

Realization and Direct Observation of Five Normal and Parametric Modes in Silicon Nanowire Resonators by in Situ Transmission Electron Microscopy

A High-Performance Bulk Mode Single Crystal Silicon Microresonator Based On A Cavity-Soi Wafer

Giant Piezoresistance Of Nano-Thick Silicon Induced By Interface Electron Traping Effect

Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice

Fabrication of NEMS Structures on the Thin SOI Substrate

Graphene Metallization of High-Stress Silicon Nitride Resonators for Electrical Integration

Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration

Solidly Mounted Resonators with Ultra‐High Operating Frequencies Based on 3R‐MoS2 Atomic Flakes

High-Band AlN Based RF-MEMS Resonator for TSV Integration

Long nanomechanical resonators with circular cross-section