A Novel Low-Warpage Hyper RDL (HRDL) Interposer Enabled by Low Temperature Hybrid Bonding for Advanced Packaging Applications

Yuan-Chiu Huang,Yu-Xian Lin,Chien-Kang Hsiung,Yu-Tao Yang,Tzu-Heng Hung,Kuan-Neng Chen
DOI: https://doi.org/10.1109/led.2024.3352252
IF: 4.8157
2024-03-02
IEEE Electron Device Letters
Abstract:To minimize warpage in the multilayer-RDL interposers, a novel approach called hyper RDL (HRDL) is proposed. The HRDL utilizes a low temperature hybrid bonding method to stack RDL layers, reducing the warpage by at least 20X as compared to the conventional semi-additive processes (SAP). The HRDL based on polymer-based hybrid bonding was demonstrated as low as 180 °C under atmosphere with a bonding strength of 47.83 kgf/cm2. Both the thermal cycling of 1000 cycles and the un-biased highly accelerated stress test of 168 hours showed less than 1.5% change in electrical resistance. The HRDL process flow is designed to ensure reasonable running costs without the need for polymer chemical mechanical planarization (CMP). This innovative approach leads to a low-warpage RDL interposer platform for advanced packaging applications.
engineering, electrical & electronic
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