Abstract:A mechanistic understanding of interactions be-tween atomically thin two-dimensional (2D) transition-metal dichalcogenides (TMDs) and their growth substrates is important for achieving the unidirectional alignment of nuclei and seamless stitching of 2D TMD domains and thus 2D wafers. In this work, we conduct a cross-sectional scanning transmission electron microscopy (STEM) study to investigate the atomic-scale nucleation and early stage growth behaviors of chemical vapor deposited monolayer (ML-) MoS2 and molecular beam epitaxy ML-MoSe2 on a Au(111) substrate. Statistical analysis reveals the majority of as-grown domains, i.e., similar to 88% for MoS2 and 90% for MoSe2, nucleate on surface terraces, with the rest (i.e., similar to 12% for MoS2 and 10% for MoSe2) on surface steps. Moreover, within the latter case, step-associated nucleation, similar to 64% of them are terminated with a Mo-zigzag edge in connection with the Au surface steps, with the rest (similar to 36%) being S-zigzag edges. In conjunction with ab initio density functional theory calculations, the results confirm that van der Waals epitaxy, rather than the surface step guided epitaxy, plays deterministic roles for the realization of unidirectional ML-MoS2 (MoSe2) domains on a Au(111) substrate. In contrast, surface steps, particularly their step height, are mainly responsible for the integrity and thickness of MoS2/MoSe2 films. In detail, it is found that the lateral growth of monolayer thick MoS2/MoSe2 domains only proceeds across mono-Au-atom high surface steps (similar to 2.4 angstrom), but fail for higher ones (bi-Au atom step and higher) during the growth. Our cross-sectional STEM study also confirms the existence of considerable compressive residual strain that reaches similar to 3.0% for ML-MoS2/MoSe2 domains on Au(111). The present study aims to understand the growth mechanism of 2D TMD wafers.

Quantitative in situ synchrotron x-ray analysis of the ALD/MLD growth of transition metal dichalcogenide TiS 2 ultrathin films

In Situ Time-Resolved Attenuated Total Reflectance Infrared Spectroscopy for Probing Metal-Organic Framework Thin Film Growth.

Atomistic Insight into the Epitaxial Growth Mechanism of Single-Crystal Two-Dimensional Transition-Metal Dichalcogenides on Au(111) Substrate

Resolving The Evolution Of Atomic Layer-Deposited Thin-Film Growth By Continuous In Situ X-Ray Absorption Spectroscopy

In-situ Investigation Via High Energy X-ray Diffraction of Stress-Induced(0002)α→(110)β Transformation in a Ti-5.5Mo-7.2Al-4.5Zr-2.6Sn-2.1Cr Alloy

Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy

Titanium Self-Intercalation Induced Formation of Orthogonal (1 × 1) Edge/Surface Reconstruction in 1T-Tise2: Atomic Scale Dynamics and Mechanistic Study

In Situ Synchrotron X-ray Diffraction Analysis of Deformation Behaviour in Ti-Ni-based Thin Films.

In Situ-Generated Volatile Precursor for CVD Growth of a Semimetallic 2D Dichalcogenide.

Quantitative Study of Particle Size Distribution in an In-Situ Grown Al–TiB2 Composite by Synchrotron X-ray Diffraction and Electron Microscopy

In situ atomistic insight into the growth mechanisms of single layer 2D transition metal carbides

Characterization and In-situ Monitoring of Sub-stoichiometric Adjustable Tc Titanium Nitride Growth

Atomic Imaging and Thermally Induced Dynamic Structural Evolution of Two-Dimensional Cr 2 S 3

In-situ Transmission Electron Microscope Investigation of Atomic-scale Titanium Silicide Monolayer Superlattice

Atomic layer deposition-based tuning of the pore size in mesoporous thin films studied by in situ grazing incidence small angle x-ray scattering

Quantitative Phase Analysis In The Ti-Al-C Ternary System By X-Ray Diffraction

Electrochemical Monitoring of TiO 2 Atomic Layer Deposition by Chronoamperometry and Scanning Electrochemical Microscopy

X-ray Absorption Linear Dichroism at the Ti K-edge of TiO2 anatase single crystal

Direct Observation of Transition Metal Dichalcogenides in Liquid with Scanning Tunneling Microscopy

Evolution of electronic structure on Transition Metal doped Titanium Disulfide by angle-resolved photoemission spectroscopy study

Atomic-scale Measurement of Structure and Chemistry of a Single-Unit-cell Layer of LaAlO3 Embedded in SrTiO3.