Soft X‐ray wavefront sensing at an ellipsoidal mirror shell

Christoph Braig,Jürgen Probst,Heike Löchel,Ladislav Pina,Thomas Krist,Christian Seifert
DOI: https://doi.org/10.1107/s1600577524003643
IF: 2.557
2024-06-07
Journal of Synchrotron Radiation
Abstract:Phase retrieval at an axisymmetric ellipsoidal mirror is demonstrated with soft X‐rays (277 eV), completed by a reconstruction of the focus as well as figure and alignment error of the mirror. Based on simple measurements of the cross‐focal, three‐dimensional intensity distribution, an intuitive algorithm is proposed which combines the advantages of high resolution, sensitivity and reliability even under difficult conditions like a low source flux or weak spatial coherence.A reliable `in situ' method for wavefront sensing in the soft X‐ray domain is reported, developed for the characterization of rotationally symmetric optical elements, like an ellipsoidal mirror shell. In a laboratory setup, the mirror sample is irradiated by an electron‐excited (4.4 keV), micrometre‐sized (∼2 μm) fluorescence source (carbon Kα, 277 eV). Substantially, the three‐dimensional intensity distribution I(r) is recorded by a CCD camera (2048 × 512 pixels of 13.5 μm) at two positions along the optical axis, symmetrically displaced by ±21–25% from the focus. The transport‐of‐intensity equation is interpreted in a geometrical sense from plane to plane and implemented as a ray tracing code, to retrieve the phase Φ(r) from the radial intensity gradient on a sub‐pixel scale. For reasons of statistical reliability, five intra‐/extra‐focal CCD image pairs are evaluated and averaged to an annular two‐dimensional map of the wavefront error . In units of the test wavelength (C Kα), an r.m.s. value = ±10.9λ0 and a peak‐to‐valley amplitude of ±31.3λ0 are obtained. By means of the wavefront, the focus is first reconstructed with a result for its diameter of 38.4 μm, close to the direct experimental observation of 39.4 μm (FWHM). Secondly, figure and slope errors of the ellipsoid are characterized with an average of ±1.14 μm and ±8.8 arcsec (r.m.s.), respectively, the latter in reasonable agreement with the measured focal intensity distribution. The findings enable, amongst others, the precise alignment of axisymmetric X‐ray mirrors or the design of a wavefront corrector for high‐resolution X‐ray science.
optics,physics, applied,instruments & instrumentation
What problem does this paper attempt to address?