Surface acoustic wave relative humidity sensor based on GO/TiO 2 sensitive film

Yawen Dou,Cuiping Li,Wensen Luo,Lirong Qian,Litian Wang,Dan Li,Hongji Li,Mingji Li
DOI: https://doi.org/10.1016/j.sna.2023.114906
IF: 4.291
2023-12-14
Sensors and Actuators A Physical
Abstract:A surface acoustic wave (SAW) relative humidity (RH) sensor based on graphene oxide (GO)/TiO 2 composite sensitive film was prepared. A uniform TiO 2 film was deposited on the surface of a SAW resonator by DC reaction sputtering to get a TiO 2 /SAW sensor. The GO was coated onto the TiO 2 /SAW by drop-coated to construct the GO/TiO 2 /SAW sensor. The large specific surface area, abundant hydrophilic functional groups, and highly stable structure of the GO/TiO 2 sensitive film are benefit to the improvement of the sensor performances. The prepared GO/TiO 2 /SAW sensor demonstrated excellent sensitive performances for practical applications, including high sensitivity, fast response and recovery, good repeatability, and good stability.
engineering, electrical & electronic,instruments & instrumentation
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