Abstract:Abstract X-ray microscope as an important nanoprobing tool is expected to play a powerful role in nano-inspections of materials. Despite the fast advances of high resolution focusing/imaging reported, the diffraction efficiency of existing binary zone plates as the lenses in the microscope is mostly around 5% in practice and rapidly goes down to 1-2% when the resolution approaches 10 nm, failing its applications in advanced scientific research. Zone plates with Kinoform profile are supposed to be high efficient, little progress for achieving both high resolution and high efficiency has been reported. The conflict between the resolution and the efficiency in X ray optics has become a long-lasting bottleneck in the further development of X-ray microscope. Based on our earlier success in developing high efficiency Kinoform zone plates by greyscale electron beam lithography, we proposed, in this work, a new zone plate structure by combing a dielectric Kinoform zone plate with an atomic layer deposited HfO2 zone plate to achieve high resolution focusing/imaging with high efficiency. Beam propagation method was applied in designing and optimizing Kinoform shapes of the zones, greyscale and/or binary electron beam lithography was carried out for generating both 3D Kinoform as well as rectangular zones with aspect ratio of 23/1 in dielectric resist, and finally high-quality atomic layer deposition of HfO2 was conducted to form the 15-nm wide outermost zone. Optical characterizations by an in-house developed soft X ray microscope demonstrated 15-nm resolution focusing/imaging with over 7% efficiency, which is the highest with such a resolution as far as our awareness. The origin of such an improvement behind the proposed novel lenses is interpreted by our BMP calculation results and the comparisons with existing performances by other reports in literature was discussed.

An effective system for evaluating the performance of micro pore optics used for lobster eye X-ray telescope

Design of Large Field of View and High Numerical Aperture Microscope Objective

Comprehensive simulation and analysis of lobster eye micro-pore optics imaging in the hard X-ray band

Stiffener and staggered-square honeycomb structure design for lobster eye x ray micro pore optics

Design and testing of optical inspection lens with large-field and high resolution

Design of Optical System for Monitoring Coating Status of Micro-Sphere at Real-Time

Defects Evaluation System for Spherical Optical Surfaces Based on Microscopic Scattering Dark-Field Imaging Method

Characterization of micro pore optics for full-field X-ray fluorescence imaging

Modeling the Focusing Efficiency of Lobster-Eye Optics for Image Shifting Depending on the Soft X-Ray Wavelength

Analysis of the Effects on Ultra-Short Laser Pulse Beam Quality Caused by Errors in Optical Systems

A dielectric Kinoform zone plate with 15 nm resolution and high efficiency for soft X-ray optics

Study of the relationship between metrological characterization and angular resolution in grazing-incidence X-ray optics

Lobster Eye X-ray Optics

A study of structural effects on the focusing and imaging performance of hard X‐rays with 20–30 nm zone plates

A Compound Kinoform/Fresnel Zone Plate Lens with 15 Nm Resolution and High Efficiency in Soft X-Ray.

Establishment and analysis of feasibility evaluation system and ultra-precision manufacturing technology for small aperture free-form surface optical element

The Optical Performance of LAMOST Telescope

Analysis of Imaging Characteristics of Wide-field Lobster Eye Lens

A Wide-Field and High-Resolution Lensless Compound Eye Microsystem for Real-Time Target Motion Perception

Chip-scale Metalens Microscope for Wide-Field and Depth-of-field Imaging

Measuring Three-Dimensional Micro-Motions of Microstructures Using Optical Sectioning