Chip-scale Metalens Microscope for Wide-Field and Depth-of-field Imaging

Xin Ye,Xiao Qian,Yuxin Chen,Rui Yuan,Xingjian Xiao,Chen,Wei Hu,Chunyu Huang,Shining Zhu,Tao Li
DOI: https://doi.org/10.1117/1.ap.4.4.046006
IF: 13.582
2022-01-01
Advanced Photonics
Abstract:Microscopy is very important in research and industry, yet traditional optical microscopy suffers from the limited field-of-view (FOV) and depth-of-field (DOF) in high-resolution imaging. We demonstrate a simultaneous large FOV and DOF microscope imaging technology based on a chip-scale metalens device that is implemented by a SiNx metalens array with a co-and cross-polarization multiplexed dual-phase design and dispersive spectrum zoom effect. A 4-mm × 4-mm FOV is obtained with a resolution of 1.74μm and DOF of 200μm within a wavelength range of 450 to 510 nm, which definitely exceeds the performance of traditional microscopes with the same resolution. Moreover, it is realized in a miniaturized compact prototype, showing an overall advantage for portable and convenient microscope technology.
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