Abstract:Subwavelength imaging requires the use of high numerical aperture (NA) lenses together with immersion liquids in order to achieve the highest possible resolution. Following exciting recent developments in metasurfaces that have achieved efficient focusing and novel beam-shaping, the race is on to demonstrate ultrahigh-NA metalenses. The highest NA that has been demonstrated so far is NA = 1.1, achieved with a TiO2 metalens and back-immersion. Here, we introduce and demonstrate a metalens with a high NA and high transmission in the visible range, based on crystalline silicon (c-Si). The higher refractive index of silicon compared to TiO2 allows us to push the NA further. The design uses the geometric phase approach also known as the Pancharatnam-Berry (P-B) phase, and we determine the arrangement of nanobricks using a hybrid optimization algorithm (HOA). We demonstrate a metalens with NA = 0.98 in air, a bandwidth (full width at half-maximum, fwhm) of 274 nm, and a focusing efficiency of 67% at 532 nm wavelength, which is close to the transmission performance of a TiO2 metalens. Moreover, and uniquely so, our metalens can be front-immersed into immersion oil and achieve an ultrahigh NA of 1.48 experimentally and 1.73 theoretically, thereby demonstrating the highest NA of any metalens in the visible regime reported to the best of our knowledge. The fabricating process is fully compatible with microelectronic technology and therefore scalable. We envision the front-immersion design to be beneficial for achieving ultrahigh-NA metalenses as well as immersion metalens doublets, thereby pushing metasurfaces into practical applications such as high resolution, low-cost confocal microscopy and achromatic lenses.

Focusing Characteristics and Widefield Imaging Performance of the Silicon Metalens in the Visible Range

Metalens-integrated Compact Imaging Devices for Wide-Field Microscopy

Ultra-thin, Zoom Capable, Flexible Metalenses with High Focusing Efficiency and Large Numerical Aperture

Broadband Achromatic Polarization Insensitive Metalens Design in the Near-Infrared Spectrum

Single-layer metalens for achromatic focusing with wide field of view in the visible range

Achromatic and Wide Field of View Metalens Based on the Harmonic Diffraction and a Quadratic Phase

A broadband achromatic metalens for focusing and imaging in the visible

Long-infrared Dual-Wavelength Linear-Polarization-multiplexed Confocal Metalens Based on an All-Silicon Dielectric

High-efficiency, 80-mm aperture metalens telescope

Imaging Based on Metalenses

Visible-light Metalens Far-Field Nanofocusing Effects with Active Tuning of Focus Based on MIM Subwavelength Structures Used in an Integrated Imaging Array

Broadband and high-numerical-aperture sharp focusing for waterborne sound with metagrating-based lens

Ultrahigh Numerical Aperture Metalens at Visible Wavelengths

Longitudinal tri-foci Metalens empowered multiple-magnification and diffraction-limited microscope

Wide Field-of-View, Large-Area Long-wave Infrared Silicon Metalenses

Large-aperture imaging system based on 100 mm all-Si metalens in long-wave infrared

Chip-scale Metalens Microscope for Wide-Field and Depth-of-field Imaging

Off-chip Far-field Focusing with Annular Coupling Gratings

Ultra-broadband achromatic metalens with high performance for the entire visible and near-infrared spectrum

On-chip Monolithic Wide-Angle Field-of-view Metalens Based on Quadratic Phase Profile

Synthetic Aperture Metalens