PRISM: three-dimensional sub-diffractive phase-resolved imaging spectroscopic method

Artur Dobrowolski,Jakub Jagiełło,Beata Pyrzanowska,Karolina Piętak-Jurczak,Ewelina B. Możdżyńska,Tymoteusz Ciuk
DOI: https://doi.org/10.1038/s41598-024-72308-z
IF: 4.6
2024-09-28
Scientific Reports
Abstract:We demonstrate a genuine method for three-dimensional pictorial reconstructions of two-dimensional, three-dimensional, and hybrid specimens based on confocal Raman data collected in a back-scattering geometry of a 532-nm setup. The protocol, or the titular PRISM ( P hase- R esolved I maging S pectroscopic M ethod), allows for sub-diffractive and material-resolved imaging of the object's constituent material phases. The spacial component comes through either the signal distal attenuation ratio (direct mode) or subtle light-matter interactions, including interference enhancement and light absorption (indirect mode). The phase component is brought about by scrutinizing only selected Raman-active modes. We illustrate the PRISM approach in common real-life examples, including photolithographically structured amorphous Al 2 O 3 , reactive-ion-etched homoepitaxial SiC, and Chemical Vapor Deposition graphene transferred from copper foil onto a Si substrate and AlGaN microcolumns. The method is implementable in widespread Raman apparatus and offers a leap in the quality of materials imaging. The lateral resolution of PRISM is stage-limited by step motors to 100 nm. At the same time, the vertical accuracy is estimated at a nanometer scale due to the sensitivity of one of the applied phenomena (interference enhancement) to the physical property of the material (layer thickness).
multidisciplinary sciences
What problem does this paper attempt to address?