Abstract:Multispectral imagers that capture spatial and spectral information are of growing importance in various fields, particularly in remote sensing and metrology. To enable integrated snapshot multispectral imagers and eliminate the drawbacks of traditional systems, such as bulkiness and slow scanning mechanisms, miniature, broadband multispectral filter arrays with narrow line widths, high transmission, and CMOS compatibility are essential. However, current miniature filter arrays, primarily based on diffraction nanostructures, suffer from limitations such as small working bandwidth, low transmission, poor color purity, and sensitivity to polarization and incident angles. To address these challenges, we present a high-order Fabry-Perot Multispectral Filter Array (MSFA) with selective peak suppression, leveraging subwavelength structures for filter tuning without changing the physical thickness and employing an ultrathin metal layer to exploit high-order resonances, significantly extending the working range and spectral resolution. High color purity across a broad range (400nm-1000nm) is made possible through optical absorption from polysilicon and selective suppression from a platinum layer. The fabricated color filter arrays cover wavelengths from 622nm to 960nm, with Full Width Half Maximum (FWHM) ranging from 13nm to 31nm and average transmissions exceeding 60%. Furthermore, these filters can be downscaled to sizes compatible with modern CMOS imagers, reaching dimensions as small as 1um. The introduction of a resonance combining design further extends the working range (455nm-960nm), aligning with the capabilities of silicon photodetectors. Its adaptability across wavelength ranges and potential for tunable applications hold promise for transformative imaging and display technologies across a wide spectrum.

High-Order Adiabatic Elliptical-Microring Filter with an Ultra-Large Free-Spectral-Range

Free-spectral-range-free Filters with Ultrawide Tunability Across the S + C + L Band

High-performance Silicon Photonic Filters Based on High-order Adiabatic Elliptical-microrings

Selectable-FSR 10-Ghz Granularity WDM Superchannel Filter in a Reconfigurable Photonic Integrated Circuit

Thermally Tunable High-Order Microring Filters with Large Free-Spectral-range

Tunable narrow-band single-channel add-drop integrated optical filter with ultrawide FSR

Development of A Field-Widened Michelson Spectroscopic Filter for A Polarized Near-Infrared High Spectral Resolution Lidar

High-performance silicon photonic filters based on all-passive tenth-order adiabatic elliptical-microrings

Field-widened Michelson Interferometer System As the Spectroscopic Filter of High-Spectral-resolution Lidar

Design of compact dual-band quasi-elliptic filter with high selectivity and wide stopband rejection

Submicron-resonator-based add-drop optical filter with an ultra-large free spectral range.

Fsr-Free Add-Drop Filter Based on Silicon Grating-Assisted Contradirectional Couplers

High-Performance Silicon Photonic Filter Using Subwavelength-Structure Multimode Waveguide Gratings

Bandwidth Tunable Filter with Large Bandwidth and Wavelength Tuning Range

Ultra-broadband integrated optical filters based on adiabatic optimization of coupled waveguides

Narrow-Band Add-Drop Filter Based on Phase-Modulated Grating-Assisted Contra-Directional Couplers

Three-Stage Fabry-Perot Liquid Crystal Tunable Filter with Extended Spectral Range

Second-Order Microring Filter with Large Free-Spectral-Range and Wavelength-Tunable-Range over 50 Nm

Bandwidth and Center Wavelength Tunable Micro-Ring Optical Filter with Vernier Effect by Four Spectrum Combination

Ultracompact, Reflection-Free and High-Efficiency Channel Drop Filters Based on Photonic Crystal Nanobeam Cavities

Ultrabroadband, high color purity multispectral color filter arrays