Distortion measurement of a lithography projection lens based on multichannel grating lateral shearing interferometry

Yisha Cao,Yunjun Lu,Peng Feng,Xiaoyue Qiao,Sotero Ordones,Rong Su,Xiangzhao Wang
DOI: https://doi.org/10.1364/ao.513688
IF: 1.9
2024-03-08
Applied Optics
Abstract:Yisha Cao, Yunjun Lu, Peng Feng, Xiaoyue Qiao, Sotero Ordones, Rong Su, Xiangzhao Wang The optical distortion of the lithographic projection lens can reduce imaging quality and cause overlay errors in lithography, thus ... [Appl. Opt. 63, 2056-2064 (2024)]
optics
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