Abstract:In situ investigation of chemical vapor deposition (CVD) is of critical importance to understanding growth mechanisms of transition-metal dichalcogenides (TMDs) and to develop technologies for growing high-quality monolayer single crystals. However, the in situ investigation is still a great challenge in practice, because TMD CVD growth is conducted at a high temperature with a reduction environment. In this work, we developed an in situ investigation system for CVD growth and presented real-time observations of monolayer MoS2 deposition on the SiO2/Si substrate. We discovered that monolayer MoS2 should be grown via the vapor-state precursor reaction and crystallized from the prenucleation sites on a substrate, an intermediate-phase MoO2 was essential for the nucleation seeding, but the population density should be controlled, and a high-concentration S vapor promoted the in-plane epitaxial growth of MoS2; hence, it was of great benefit to obtain a high-quality monolayer with a compact shape.The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsaelm.0c00231.Figure S1. Schematic representation of MoS2 CVD growth in a microfurnace; Figure S2. Sulfurization process of 2D MoO3 flakes with the thickness of 6 nm; Figure S3. Raman characterization of monolayer MoS2 grown via two modes; Figure S4. Characterization of the MoO2 film sulfurized by the high-temperature S vapor; Figure S5. High-quality monolayer MoS2 growth using the microfurnace under in situ observations (PDF)Movie S1. MoO3 sublimation (MPG)Movie S2. In situ observation of MoS2 growth (MPG)Movie S3. In situ observation of MoO2 deposition (MPG)Movie S4. Monolayer MoS2 growth vs MoO2 deposition (MPG)Movie S5. Monolayer MoS2 growth and roughing (MPG)This article has not yet been cited by other publications.

In Situ Imaging of Two-Dimensional Crystal Growth Using a Heat-Resistant Optical Microscope

Molecular growth investigation system using fluorescence microscopy in ultra-high vacuum environment

In Situ High Temperature Microwave Microscope for Nondestructive Detection of Surface and Sub-Surface Defects.

Stereo Imaging of Crystal Growth

Development and application of a high-temperature imaging system for in-situ scanning electron microscope

Thermal Conductivity Imaging at Micrometre-Scale Resolution for Combinatorial Studies of Materials

In Situ Imaging of On-Surface, Solvent-Free Molecular Single-Crystal Growth.

In Situ Visualization of the Quasi-Periodic Crystal Growth Interface Fluctuation by Growth Interface Electromotive Force Spectrum in a Czochralski System

Atomic-scale insights into the formation of 2D crystals from in situ transmission electron microscopy

Interface diagnostics: In-situ determination of crystal-melt interface shape evolutions via probing growth interface electromotive force

An optical diagnosis system for in-situ observing and estimating crystal growth situation

Applications of synchrotron microradiography in materials science——in situ visualization of the growth of metallic alloy crystals

Direct observation of the CVD growth of monolayer MoS$_2$ using $in-situ$ optical spectroscopy

In Situ Scanning–digital Image Correlation for High-Temperature Deformation Measurement of Nickel-Based Single Crystal Superalloy

High-Temperature In Situ Investigation of Chemical Vapor Deposition to Reveal Growth Mechanisms of Monolayer Molybdenum Disulfide

Development of a new laser heating system for thin film growth by chemical vapor deposition.

A 4D X-Ray Computer Microtomography for High-Temperature Electrochemistry

In Situ Three-Dimensional Electron Diffraction for Probing Structural Transformations of Single Nanocrystals

In Situ TEM Observation of Liquid Flow Induced Dense Phase Formation and Anisotropic Nanocrystal Growth

An In Situ Reflectance Spectroscopic Investigation to Monitor Two-Dimensional MoS2 Flakes on a Sapphire Substrate

Development of in Situ Characterization of Two-Dimensional Materials Grown on Insulator Substrates with Spectroscopic Photoemission and Low Energy Electron Microscopy