High-performance integrated chip-level thermoelectric device for power generation and microflow detection

Zekun Liu,Shuai Zhang,Zhenhua Wu,Erzhen Mu,Hong Wei,Yan Liu,Huilie Shi,Zhiyu Hu
DOI: https://doi.org/10.1016/j.nanoen.2023.108611
IF: 17.6
2023-06-17
Nano Energy
Abstract:Miniaturized thermoelectric devices (TED) possess great benefits in energy converting and sensing. By employing improved microfabrication technology, we succeed made an ultra-highly integrated TED with enhanced interfacial and structural qualities at a high filling factor of 61 %. Our micro-TED (2 cm × 2 cm×6 μm, 10,082 TE pairs) achieved an open-circuit voltage up to 2.6 V, an output power of 1.2 mW (temperature difference of 62.8 K). The micro-TED delivered a large temperature gradient up to ∼600 K/mm with input current, achieving a net cooling temperature of 3.6 K with a 3 μm thick thermoelectric layer. As a novel microflow sensor, micro-TED can distinguish ultra-slow cold/hot airflows down to 4 mm/s. The ultra-thin integrated micro-TED can find multi-featured applications in ultra-low-grade thermal energy harvesting, localized chip-to-chip cooling, and hypersensitive sensing.
materials science, multidisciplinary,chemistry, physical,physics, applied,nanoscience & nanotechnology
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