Towards high integration and power density: Zigzag-type thin-film thermoelectric generator assisted by rapid pulse laser patterning technique

Yuedong Yu,Wei Zhu,Yaling Wang,Pengcheng Zhu,Kang Peng,Yuan Deng
DOI: https://doi.org/10.1016/j.apenergy.2020.115404
IF: 11.2
2020-10-01
Applied Energy
Abstract:<p>Cross-plane thin-film thermoelectric generator has become a new hotspot as power supply for microelectronic chips and wearable devices. Nevertheless, the poor incompatibility between thin-film thermoelectric generator with high-density thermoelectric legs and traditional semiconductor processing leads to much difficulty in performance improvement. Herein, a Zigzag-type thermoelectric leg structure is designed assisted by a low-cost rapid pulse laser patterning technique to realize the fabrication of high-density thermoelectric arrays. Furthermore, an investigation of threshold fluences of interaction between laser and materials is conducted to explore the compatibility between pulse laser ablation and thin-film thermoelectric generator fabrication. With the high-property thermoelectric materials achieved by high temperature treatment, the high-density integrated thin-film thermoelectric generator presents a power density of 1.04 mW cm<sup>−2</sup> at a temperature difference of 88 K. This high output makes it an excellent micro power source to drive a variety of devices for a self-power system. Moreover, a detailed analysis about the additional thermal resistance is carried out to provide a guide for the practical application.</p>
energy & fuels,engineering, chemical
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