4H–SiC photoconductive switching devices for use in high-power applications

S. Doǧan,A. Teke,D. Huang,H. Morkoç,C. B. Roberts,J. Parish,B. Ganguly,M. Smith,R. E. Myers,S. E. Saddow
DOI: https://doi.org/10.1063/1.1571667
IF: 4
2003-05-05
Applied Physics Letters
Abstract:Silicon carbide is a wide-band-gap semiconductor suitable for high-power high-voltage devices and it has excellent properties for use in photoconductive semiconductor switches (PCSSs). PCSS were fabricated as planar structures on high-resistivity 4H–SiC and tested at dc bias voltages up to 1000 V. The typical maximum photocurrent of the device at 1000 V was about 49.4 A. The average on-state resistance and the ratio of on-state to off-state currents were about 20 Ω and 3×1011, respectively. Photoconductivity pulse widths for all applied voltages were 8–10 ns. These excellent results are due in part to the removal of the surface damage by high-temperature H2 etching and surface preparation. Atomic force microscopy images revealed that very good surface morphology, atomic layer flatness, and large step width were achieved.
physics, applied
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