Abstract:The linear translation stages play an important role in computer numerical control machine tools, coordinate measuring machines and semiconductor lithograph equipment. Six geometric motion errors are associated with a precision linear stage. High precision simultaneous measurement of multiple degrees of freedom is essential for the multiple-dimension motion calibration of the ultra-precision linear translation stage. In this paper, a laser heterodyne interferometer for simultaneous measurement of displacement and roll angle based on the acousto-optic modulator is proposed. In this optical configuration, a stabilize single-frequency laser (f(0)) and two acousto-optic modulators are used to generate the laser source. The frequency shifts of the two AOMs are f(1) and f(2), respectively. The positive first order diffraction beams of two AOMs, f(0)+f(1) and f(0)+f(2), are merged into one orthogonally and linearly polarized beam with a frequency offset of (f(1)-f(2)) as the laser source for the roll measurement-unit. A half wave plate (HWP) is utilized as the roll sensing plate to magnify the tiny roll angle into an observable phase shift based on the change of polarization state. The resolution of the roll measurement system is determined by the amplification factor which can be enhanced by a multi-reflection cavity made of a specifically arranged assembly square pyramidal mirror and a folding mirror. The zeroth beam f(0) and the positive first order beam f(0)+f(1) provided by two AOMs forms two space separated beams for the displacement measurement, which can eliminate the periodic nonlinearity error. The optical system of the simultaneous measurement of displacement and roll angle were setup. The experimental results showed good repeatability and good consistency.

External Modulation Laser Module Assembly for Improving Measurement Performance of Homodyne Interferometry

Modified Homodyne Laser Interferometer Based on Phase Modulation for Simultaneously Measuring Displacement and Angle.

Injection Locking Method for Raman Beams in Atom Interferometer

External Cavity Diode Laser with Long-Term Frequency Stabilization Based on Mode Boundary Detection

Constant amplitude modulation heterodyne interferometry

Quasi-common-path Laser Feedback Interferometry Based on Frequency Shifting and Multiplexing.

Measurement and Characterization of Microwave Interaction Between Integrated Distributed Feedback Laser Diode and Electro-Absorption Modulator

External Modulation Method for Generating Accurate Linear Optical FMCW

Method to Reduce First Harmonic Nonlinearity in Laser Heterodyne Interferometry

Method for Suppressing Periodic Nonlinear Errors Caused by High-Order Optical Crosstalk in High-Subdivision Homodyne Interferometer

High–Speed Laser Modulation for Low–Noise Micro–Cantilever Array Deflection Measurement

Green Laser Interferometric Metrology System with Sub-Nanometer Periodic Nonlinearity

The Method to Measure the Nonlinearity in Laser Heterodyne Interferometer

Correction of nonlinear errors from PGC carrier phase delay and AOIM in fiber-optic interferometers for nanoscale displacement measurement.

Laser Heterodyne Interferometer for Simultaneous Measurement of Displacement and Roll Angle Based on the Acousto-Optic Modulators

Model and Measurement Method of Optical Nonlinearities Caused by the Heterodyne and Homodyne Interference Terms in the Heterodyne Interferometer

Obtaining High Fringe Precision in Self-Mixing Interference Using A Simple External Reflecting Mirror

Sub-external Cavity Effect and Elimination Method in Laser Self-Mixing Interference Wave Plate Measurement System

New Advance In Laser Interferometry

Measurement Method for Nonlinearity in Heterodyne Laser Interferometers Based on Double-Channel Quadrature Demodulation

Homodyne Laser Interferometer Involving Minimal Quadrature Phase Error to Obtain Subnanometer Nonlinearity.