Method for Suppressing Periodic Nonlinear Errors Caused by High-Order Optical Crosstalk in High-Subdivision Homodyne Interferometer

Yizhou Xia,Leijie Wang,Yu Zhu,Rong Cheng,Ming Zhang,Weinan Ye
DOI: https://doi.org/10.1016/j.optlaseng.2022.107387
IF: 5.666
2022-01-01
Optics and Lasers in Engineering
Abstract:The periodic nonlinear error (PNL) caused by the high-order optical crosstalk of the homodyne interferometer with high optical subdivisions cannot be perfectly compensated by the ellipse fitting correction algorithm. In this paper, we focus on the PNL and propose a method to suppress it. In the method, the core idea of the multiple measurement signals algorithm is to eliminate the redundant items in the signals through the linear combination of six signals with the certain phase differences. Practical schemes for signals generation are also described in detail. The method is verified by simulations and experiments. In the experiments, the method proposed suppresses PNL at the order of 100 pm/root Hz compared with direct ellipse fitting correction algorithm (at the order of 1 nm/ root Hz).
What problem does this paper attempt to address?