Abstract:Femtosecond lasers have opened up new avenues in materials processing due to their unique characteristics of ultrashort pulse widths and extremely high peak intensities. The short pulse width suppresses the formation of a heat-affected zone, which is vital for ultrahigh precision fabrication, whereas the high peak intensity allows multiphoton absorption to be induced in materials that are transparent to the laser wavelength. More interestingly, irradiation with tightly focused femtosecond laser pulses inside transparent materials provides a facile route to modify the interior of transparent materials in a spatially selective manner, enabling three-dimensional (3D) fabrication and integration of multifunctional micro-/nano-structures and components in a monolithic substrate. For instance, femtosecond laser pulses have been used to write optical waveguides in both passive and active materials by locally modifying their refractive indices. In combination with wet chemical etching, femtosecond laser direct writing has also been used to fabricate microfluidic structures, including microchannels and chambers, microvalves, and micropumps. The same technique has been extended to fabricate free-space optics such as micromirrors and micro-optical lenses in glass materials. By virtue of its unique ability to build different types of functional components into a monolithic substrate, femtosecond laser direct writing offers a flexible approach to fabricate a wide variety of integrated devices and microsystems. Although femtosecond laser micromachining have indeed shown extreme flexibility for fabrication and integration of 3D multifunctional micro- components in bulk transparent materials, several major issues still exist, such as the limited size of the microfluidic structures, the limited fabrication resolution, high surface roughness, and so on. This review focuses primarily on the recent efforts to tackle the two issues as mentioned above. By use of femtosecond laser direct writing in porous glass immersed in water followed by post-annealing, we demonstrated microfluidic channels with nearly unlimited lengths and arbitrary 3D geometries. By controlling the laser peak intensity and polarization, a single nanoplane with sub-50-nm feature size could be achieved inside porous glass based on these strategies, several functional devices and their applications have been demonstrated, including 3D passive microfluidic mixer and an integrated micro-nanofluidic system for single DNA analysis. Furthermore, we demonstrate fabrication of 3D whispering gallery microcavities with quality (Q)-factors on the level of ~1×106 in glass chips by femtosecond laser direct writing followed by CO2 laser reflow.

Microspatially modulating hydrophilic/hydrophobic property on glass surface using femtosecond laser direct writing

Fabrication of Multifunctional Components in a Glass Chip with Femtosecond Laser Direct Writing

Femtosecond pulsed laser micro-machining of glass substrates with application to microfluidic devices

Microfluidic Channels Fabrication Based on Underwater Superpolymphobic Microgrooves Produced by Femtosecond Laser Direct Writing

Femtosecond Laser Interference Micro-patterning on Mold Surface to Improve Hydrophobicity for Microfluid Applications

Study of surface wettability on fused silica by ultrafast laser-induced micro/nano-surface structures

Direct laser writing of 3D microfluidic structures in glass for lab-on-a-chip applications

Flexible metal patterning in glass microfluidic structures using femtosecond laser direct-write ablation followed by electroless plating

Femtosecond laser-induced non-centrosymmetric surface microstructures on bulk metallic glass for unidirectional droplet micro-displacement

Direct Femtosecond Laser Processing for Generating High Spatial Frequency LIPSS (HSFL) on Borosilicate Glasses with Large-Area Coverage

monolithically integrated into 3 D glass micro fl uidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis †

Hydrophobic Surface Fabricated by Laser Interference Lithography

Microfabrication and Surface Functionalization of Soda Lime Glass through Direct Laser Interference Patterning

Fabrication of Microchannels on Silica Glass by Femtosecond Laser Multi-Scan： from Surface Generation Mechanism to Morphology Control

Electrofluidics fabricated by space-selective metallization in glass microfluidic structures using femtosecond laser direct writing.

Femtosecond Laser Weaving Superhydrophobic Patterned PDMS Surfaces with Tunable Adhesion

Micro-nano fabrication of femtosecond laser wet etch

Single-step maskless nano-lithography on glass by femtosecond laser processing

Rapid Fabrication of Smooth Micro-Optical Components on Glass by Etching-Assisted Femtosecond Laser Modification

Revealing Extraordinary Properties of Femtosecond Laser Writing in Glass

Picosecond laser processing super-wetting surfaces with hierarchical structures for passive driving of microfluidics