A new SOI sensor design for detecting cancer using hybrid waveguide with higher sensitivity than both strip and slot waveguides

Sherine Shawky,Ahmed H. Abd El-Malek,Ahmed Allam,Hossam M. H. Shalaby

DOI: https://doi.org/10.1007/s11082-023-06082-z

IF: 3

2024-01-27

Optical and Quantum Electronics

Abstract:Abstract A new highly accurate optical biomedical sensor is proposed for cancer detection characterized by high sensitivity, small footprint, low cost, and low limit of detection. The sensor is based on double-ring resonators made of silicon on insulator. The type of the waveguide is critical in determining the sensor performance. To compromise the advantages and disadvantages of strip and slot waveguides, a mixed design of both has been introduced in literature at the expense of increased footprint compared to traditional sensors. Indeed, almost 27-fold footprint increase is required to improve the sensitivity by only one third of that of slot waveguide’s sensitivity. In this paper, we introduce a new design that keeps the same footprint of traditional sensors, while achieving high sensitivity. This sensitivity depends on the resonance wavelength shift due to different refractive indices of the biosample. It has the value 109.8 nm/RIU compared to 55.57 nm/RIU and 129.621 nm/RIU for strip and slot waveguides, respectively. The hybrid waveguide quality factor is 537.7 while the quality factors of the strip and the slot waveguides are 627.99 and 380.76, respectively. In addition, the new design achieves the minimum limit of detection (0.0255) when compared to that of traditional designs. Furthermore, a new method of detection is proposed with the same design, providing a higher sensitivity over both traditional waveguide types with a value of 15.3, compared to 13.2 and 11.5 for strip and slot waveguides, respectively. In this method, the sensitivity relies on various values of output transmitted light at the same wavelength due to altering the biocell refractive index. The biosensor output equation is developed. In addition, the relationship between the supermodes and the sensitivity is determined at variance conditions. It is found that there is an inverse relation between them.

engineering, electrical & electronic,optics,quantum science & technology

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to develop a new type of highly - sensitive biomedical optical sensor for the early detection of cancer. Specifically, the objectives of the paper include the following aspects:

1. **Improve sensor sensitivity**:
The paper proposes a design based on a hybrid waveguide, which has higher sensitivity than the traditional strip waveguide and slot waveguide. Through optimized design, the sensitivity of the new sensor reaches **109.8 nm/RIU**, which is approximately **98%** higher than that of the strip waveguide and is close to **85%** of the sensitivity of the slot waveguide.

2. **Maintain the small size of traditional sensors**:
Compared with some existing hybrid designs, this design achieves high sensitivity without increasing the sensor size (footprint). The area of the traditional sensor mentioned in the paper is **135.127 μm²**, while other designs may require a larger area to achieve similar performance.

3. **Reduce the limit of detection (LOD)**:
The new design achieves a lower intrinsic limit of detection (iLOD) with a value of **0.0255**, which is better than that of the strip waveguide (0.04318) and the slot waveguide (0.032).

4. **Introduce a new detection method**:
In addition to the traditional sensitivity measurement method based on resonance wavelength shift, the paper also proposes a new sensitivity measurement method based on the difference in transmitted light intensity. The sensitivity value of this method is **15.3**, which is higher than that of the strip waveguide (13.2) and the slot waveguide (11.5).

### Formula summary
The key formulas involved in the paper are as follows:

- **Normalized transmission equation**:
$$
T = \frac{v_1^2 + v_1^2 v_2^2 v_3^2 u_2^2 - 2v_1^2 v_2 v_3 u_2^2 \cos\phi_2 + v_2^2 u_2^2 + v_3^2 u_1^2 u_2^2 - 2v_2 v_3 u_2^2 \cos\phi_2 - 2v_1 v_2 u_1 \cos\phi_1}{1 + v_2^2 v_3^2 u_2^2 - 2v_2 v_3 u_2^2 \cos\phi_2 + v_1^2 v_3^2 u_1^2 u_2^2 - 2v_1^2 v_2 v_3 u_1^2 u_2^2 \cos\phi_2 - 2v_1 v_2 u_1 \cos\phi_1 + v_1^2 v_2^2 u_1^2 + 2v_1 v_3 u_1 u_2 \cos\phi_1 \cos\phi_2 - 2v_1 v_2^2 v_3 u_1 u_2^2 \cos\phi_1}
$$

- **Sensitivity calculation formula**:
$$
S = S_{\text{wg}} S_{\text{rr}} = \frac{\Delta n_{\text{eff}}}{\Delta n_{\text{clad}}} \cdot \frac{\Delta \lambda}{\Delta n_{\text{eff}}}
$$

- **Optical quality factor**:
$$
Q = \frac{\lambda_{\text{res}}}{\text{FWHM}}
$$

- **Intrinsic limit of detection**:
$$
iLOD = \frac{\text{FWHM}}{S}
$$

### Conclusion
By optimizing the design of the hybrid waveguide, the paper significantly improves the sensitivity while maintaining the size of the traditional sensor and reduces the limit of detection. In addition, the new detection method based on the difference in transmitted light intensity proposed in the paper further improves the performance of the sensor. These improvements provide more efficient and accurate technical means for the early detection of cancer.