Residual Compressive Stress Enabled 2D-to-3D Junction Transformation in Amorphous Carbon Films for Stretchable Strain Sensors

Xin Ma,Qi Zhang,Peng Guo,Xiaoshan Tong,Yulong Zhao,Aiying Wang
DOI: https://doi.org/10.1021/acsami.0c12073
2020-09-09
Abstract:Usually, two-dimensional (2D) flexible strain sensors based on cracks have very high sensitivities but small measuring ranges, while the three-dimensional (3D) ones behave in the opposite way. Here, by utilizing the large residual compressive stress of an amorphous carbon (a-C) film and the flexibility of polydimethylsiloxane (PDMS), we developed a facile and economic strategy to fabricate a high-sensitive a-C/PDMS stretchable strain sensor. Results showed that for the first time, the a-C film ranging from 25 nm to 1 μm changed the shape and orientation of conductive scales, as well as made a one-step 2D-to-3D electrical junction transformation in integrated sensors. In particular, the sensor with a 1 μm thick a-C film exhibited the best comprehensive performance, displaying a maximum gauge factor of 746.7 and strain range up to 0.5. However, the linearity decreased slightly as the strain range went beyond 0.43. Additionally, the sensor showed a satisfactory repeatability for 5000 cycles, together with excellent time and temperature drift performances at zero position of 75 ppm full scale (FS) and 25 ppm FS·°C<sup>–1</sup> in the range of −20 to 155 °C, respectively. The sensor has large potentials for wearable devices used in the monitoring of various human motions and physiological signals.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsami.0c12073?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsami.0c12073</a>.Phase content and sheet resistance of the a-C films; residual stress test result of the a-C films; Young's modulus and hardness test result of the a-C films; schematic of DC sputtering for a-C deposition; XPS C1s spectra of the a-C films; three-cycle load–strain curve of the 160 min sample; count result of the area and number of the scales; and AFM-measured morphology of a-C SSES and the height information (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c12073/suppl_file/am0c12073_si_001.pdf">PDF</a>)Antioverload test of the sensor (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c12073/suppl_file/am0c12073_si_002.mp4">MP4</a>)Response of the sensor to head rising (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c12073/suppl_file/am0c12073_si_003.mp4">MP4</a>)This article has not yet been cited by other publications.
materials science, multidisciplinary,nanoscience & nanotechnology
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