Abstract:In the past decade, lithium niobate (LiNbO3 or LN) photonics, thanks to its heat-free and fast electro-optical modulation, second-order non-linearities and low loss, has been extensively investigated. Despite numerous demonstrations of high-performance LN photonics, processing lithium niobate remains challenging and suffers from incompatibilities with standard complementary metal-oxide semiconductor (CMOS) fabrication lines, limiting its scalability. Silicon carbide (SiC) is an emerging material platform with a high refractive index, a large non-linear Kerr coefficient, and a promising candidate for heterogeneous integration with LN photonics. Current approaches of SiC/LN integration require transfer-bonding techniques, which are time-consuming, expensive, and lack precision in layer thickness. Here we show that amorphous silicon carbide (a-SiC), deposited using inductively coupled plasma enhanced chemical vapor deposition (ICPCVD) at low temperatures (< 165 C), can be conveniently integrated with LiNbO3 and processed to form high-performance photonics. Most importantly, the fabrication only involves a standard, silicon-compatible, reactive ion etching step and leaves the LiNbO3 intact, hence its compatibility with standard foundry processes. As a proof-of-principle, we fabricated waveguides and ring resonators on the developed a-SiC/LN platform and achieved intrinsic quality factors higher than 106,000 and resonance electro-optic tunability of 3.4 pm/V with 3 mm tuning length. We showcase the possibility of dense integration by fabricating and testing ring resonators with 40um radius without a noticeable loss penalty. Our platform offers a CMOS-compatible and scalable approach for implementation of future fast electro-optic modulators and reconfigurable photonic circuits as well as nonlinear processes which can benefit from involving both second and third-order nonlinearities.

InP/LiNbO 3 Covalent Heterointerface Construction via an Asymmetric Plasma Activation Strategy for Hybrid Integrated Quantum Systems

InP/LiNbO3 Covalent Heterointerface Construction Via an Asymmetric Plasma Activation Strategy for Hybrid Integrated Quantum Systems.

Wafer-level InP-Si Covalent Bonding and Defect-Free Heterointerface for Photonic Quantum Systems

Photonic Integrated Circuits and Components Using Quantum Well Intermixing

Photonic-integrated circuits and components using quantum well intermixing

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Photonic integrated circuits fabricated using quantum well intermixing

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Integration of Quantum Emitters with Lithium Niobate Photonics

HETEROGENEOUS LINBO3/SI DIRECT BONDING FOR WAVELENGTH-DEPENDENT MID-INFRARED IMAGING

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Heterogeneous integration of superconducting thin films and epitaxial semiconductor heterostructures with Lithium Niobate

Accumulation-Layer Hybridized Surface Plasmon Polaritions At An Ito/Linbo3 Interface

Heterogeneous integration of III–V semiconductor lasers on thin-film lithium niobite platform by wafer bonding

Heterogeneous Integration of Lithium Niobate and Silicon Nitride Waveguides for Wafer-Scale Photonic Integrated Circuits on Silicon.

Tightly confining lithium niobate photonic integrated circuits and lasers

Hybrid Integration of Lithium Niobate on Insulator Waveguide and AlGaInAs Laser

Research Progress of Lithium Niobate Waveguide and Its Application in Quantum Information Technology