Abstract:The layered two-dimensional (2D) materials, e.g., the well-known graphene, transition metal dichalcogenides, and topological insulators, have attracted great interest of researchers from fundamental research as well as industries owing to their intriguing properties in a number of aspects. In practical applications, the efficient modification of the features of 2D materials is compelling and essential to achieve desired functionalities. Ion implantation has been successfully applied to synthesize graphene. The most exotic advantage of ion beam technology is that it offers distinct options of energetic beams, which has recently shown the unique capability to modify and tailor the properties of versatile 2D materials. To name a few, the energetic ion beams could implement the surface morphology or layer-to-layer structural engineering of 2D materials. At the microcosmic level, the introduction of ion beam induced defects and intentional doping of specific ions are the basis of tailoring properties of 2D materials. By manipulating the parameters of ion beams (energies, species, fluences, incident angles, etc.), the modified 2D materials may possess novel properties, which are unprecedented in pristine ones. Promising applications based on these 2D materials with ion beam tailored features have been realized in a broad range of fields. In this work, we systematically review the latest research progress on the deployed techniques and property modifications of graphene and other 2D materials under the treatment of various ion beams. A few selected applications are presented to indicate the practical potentials of ion beam modified 2D materials in distinct areas. Perspectives on future developments are also provided by focusing on several promising topics.

Field Ion Sources for Research and Modification of the Structure of Amorphous and Crystalline Materials

Bright focused ion beam sources based on laser-cooled atoms

High current ion beam formation with strongly inhomogeneous electrostatic field

Atom-probe Field Ion Microscope Analysis of Surfaces of Materials

Engineering Optical Materials Using Focused Ion Beams

Application of Atomic Force Microscopy in Understanding Crystallization Process

Intense ion beams for generating extreme states of matter

Ion Irradiation Modulated Magnetic Properties of Materials and Its Applications

High-energy Intense Beam Current Focusing Ion Source (Abstract)

Behavior of molecules and molecular ions near a field emitter

Improving Spatial and Elemental Associations in Analytical Field Ion Microscopy

Ion microscopy based on laser-cooled cesium atoms

Vacuum Arc Ion Sources

Controlling crystal cleavage in Focused Ion Beam shaped specimens for surface spectroscopy

Recent Research Progress in the Field of Ion Beam Modification of Materials in the Department of Technical Physics at Peking University

Development of Ion Sources for Materials Processing in China

A Review of Recent Applications of Ion Beam Techniques on Nanomaterial Surface Modification: Design of Nanostructures and Energy Harvesting

Ultrafast Field‐Emission Electron Sources Based on Nanomaterials

Fast Atomic-Scale Chemical Imaging of Crystalline Materials and Dynamic Phase Transformations.

Ion Beam Modification of Two-Dimensional Materials: Characterization, Properties, and Applications