Ion microscopy based on laser-cooled cesium atoms

M. Viteau,M. Reveillard,L. Kime,B. Rasser,P. Sudraud,Y. Bruneau,G. Khalili,P. Pillet,D. Comparat,I. Guerri,A. Fioretti,D. Ciampini,M. Allegrini,F. Fuso
DOI: https://doi.org/10.48550/arXiv.1601.01446
2016-01-07
Abstract:We demonstrate a prototype of a Focused Ion Beam machine based on the ionization of a laser-cooled cesium beam adapted for imaging and modifying different surfaces in the few-tens nanometer range. Efficient atomic ionization is obtained by laser promoting ground-state atoms into a target excited Rydberg state, then field-ionizing them in an electric field gradient. The method allows obtaining ion currents up to 130 pA. Comparison with the standard direct photo-ionization of the atomic beam shows, in our conditions, a 40-times larger ion yield. Preliminary imaging results at ion energies in the 1-5 keV range are obtained with a resolution around 40 nm, in the present version of the prototype. Our ion beam is expected to be extremely monochromatic, with an energy spread of the order of 1 eV, offering great prospects for lithography, imaging and surface analysis.
Mesoscale and Nanoscale Physics,Atomic Physics
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to image and modify different surfaces at the nanoscale. Specifically, the authors have developed a prototype of Focused Ion Beam (FIB) based on a laser - cooled cesium atomic beam. This new FIB system uses lasers to excite ground - state atoms to the Rydberg state of the target excited state, and then performs field ionization in an electric field gradient, thereby achieving efficient atomic ionization. This method can achieve high - resolution imaging and surface modification within a few nanometers. ### Main problems 1. **Improve resolution**: Traditional FIB systems are limited by chromatic aberration and other factors during low - energy ion beam operation, resulting in a decrease in resolution. The method proposed in this paper aims to reduce these limitations and provide higher resolution. 2. **Increase ion yield**: Compared with the standard direct photoionization method, this method can significantly increase the ion yield, achieving an increase of more than 40 times. 3. **Expand the application range**: By using a laser - cooled cesium atomic beam, this system is expected to achieve finer imaging and surface treatment in the low - energy range, and is suitable for fields such as nanofabrication, imaging, and surface analysis. ### Implementation methods - **Laser cooling and excitation**: First, the cesium atomic beam is cooled to a low temperature by laser cooling technology, and then the atoms are excited to a highly excited Rydberg state through a two - step laser excitation process. - **Field ionization**: In the electric field gradient, Rydberg atoms are ionized, and the generated ions are extracted and accelerated into a standard FIB column. - **Imaging and surface modification**: The accelerated ion beam is used for imaging and surface modification. Experimental results show that in the energy range of 1 - 5 keV, a spatial resolution of about 40 nm can be achieved. ### Innovation points - **Low energy dispersion**: Since the laser - cooled atomic beam has an extremely low temperature, the generated ion beam has a very narrow energy distribution, about 1 eV, which enables the system to maintain high resolution at low energy. - **Efficient ionization**: Through the methods of laser excitation and field ionization, the ion yield is significantly increased, reaching a maximum current of 130 pA. - **Multifunctional application**: This system can not only achieve high - resolution imaging, but also perform surface modification, demonstrating its potential applications in nanofabrication and surface analysis. In conclusion, this paper solves the problems of limited resolution and low ion yield of traditional FIB systems at low energy by developing a FIB prototype based on a laser - cooled cesium atomic beam, providing a new technical means for nanoscale imaging and surface treatment.