Abstract:This study introduces an innovative bilayer sensing structure for detecting trace impurity gases amidst intense fluorinated gas interference. Leveraging atomic interactions, Co2+ ions in the 2D metal–organic framework Co3(HITP)2 effectively separate F‐gas molecules. Simultaneously, the framework's high‐flux microporous structure facilitates impurity gas diffusion, enabling precise detection in challenging environments. The detection of trace impurity gases in fluorinated gas (F‐gas) that are widely used in the industry offers a significant avenue for equipment status monitoring and mitigating unnecessary emissions. However, the formidable electron affinity (EA) and adsorption propensity of F‐gas molecules render the identification of trace impurities within a high‐concentration F‐gas atmosphere exceptionally challenging. Herein, the filtration‐sensing strategy is proposed to realize highly sensitive and selective Room Temperature (RT) sensing of trace gases in the F‐gas environment. Through the innovative construction of a bilayer structure, comprising Co3(HITP)2 as the overlayer and SnO2 nanofibers (NFs) as the sensing layer, remarkably sensitive detection of trace impurity gases under intense F‐gas interference conditions is achieved. The efficacy of the Co3(HITP)2 overlayer is further corroborated through the incorporation of Pd‐SnO2 and MoS2‐SnO2 sensors, concurrently facilitating targeted quantitative identification within a complex gas mixture environment. The underlying sensing mechanism is predominantly attributed to interatomic adsorption interactions and the modulation of gas diffusion by microporous structures. This work provides pioneering insights into trace impurity detection within high‐concentration F‐gas atmosphere while presenting a potentially viable solution for the operational maintenance of F‐gas‐based industrial equipment (F‐equipment) in industrial applications.

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