Transition metal nitride thin films deposited at CMOS compatible temperatures for tunable optoelectronic and plasmonic devices

Ryan Bower,Daniel A. L. Loch,Andrey Berenov,Bin Zou,Papken Eh. Hovsepian,Arutiun P. Ehiasarian,Peter K. Petrov

DOI: https://doi.org/10.48550/arXiv.2005.05185

2020-05-11

Applied Physics

Abstract:Transition metal nitrides have received significant interest for use within plasmonic and optoelectronic devices. However, deposition temperature remains a significant barrier to the integration of transition metal nitrides as plasmonic materials within CMOS fabrication processes. Binary, ternary and layered transition metal nitride thin films based on titanium and niobium nitride are deposited using High Power Impulse Magnetron Sputtering (HIPIMS). The increased plasma densities achieved in the HIPIMS process allow high quality plasmonic thin films to be deposited at CMOS compatible temperatures of less than 300{\deg}C. Thin films are deposited on a range of industrially relevant substrates and display tunable plasma frequencies in the ultraviolet to visible spectral ranges. The thin film quality, combined with the scalability of the deposition process, indicates that HIPIMS deposition of nitride films is an industrially viable technique and can pave the way towards the fabrication of next generation plasmonic and optoelectronic devices.