Abstract:In recent years, there has been significant interest in incorporating micro-actuators into industrial environments; this interest is driven by advancements in fabrication methods. Piezoelectric actuators (PEAs) have emerged as vital components in various applications that require precise control and manipulation of mechanical systems. These actuators play a crucial role in the micro-positioning systems utilized in nanotechnology, microscopy, and semiconductor manufacturing; they enable extremely fine movements and adjustments and contribute to vibration control systems. More specifically, they are frequently used in precision positioning systems for optical components, mirrors, and lenses, and they enhance the accuracy of laser systems, telescopes, and image stabilization devices. Despite their numerous advantages, PEAs exhibit complex dynamics characterized by phenomena such as hysteresis, which can significantly impact accuracy and performance. The characterization of these non-linearities remains a challenge for PEA modeling. Recurrent artificial neural networks (ANNs) may simplify the modeling of the hysteresis dynamics for feed-forward compensation. To address these challenges, robust control strategies such as integral fast terminal sliding mode control (IFTSMC) have been proposed. Unlike traditional fast terminal sliding mode control methods, IFTSMC includes integral action to minimize steady-state errors, improving the tracking accuracy and disturbance rejection capabilities. However, accurate modeling of the non-linear dynamics of PEAs remains a challenge. In this study, we propose an ANN-based IFTSMC controller to address this issue and to enhance the precision and reliability of PEA positioning systems. We implement and validate the proposed controller in a real-time setup and compare its performance with that of a PID controller. The results obtained from real PEA experiments demonstrate the stability of the novel control structure, as corroborated by the theoretical analysis. Furthermore, experimental validation reveals a notable reduction in error compared to the PID controller.

Direct adaptive neural control for precision piezoelectric actuator without hysteresis compensation

Precision control of piezoelectric actuator using support vector regression nonlinear model and neural networks

High Precision Adaptive Robust Neural Network Control of a Servo Pneumatic System

Memory-Enhanced Neural Network Control of Piezoelectric Actuators With a Rate-Amplitude-Dependent Hysteresis Model

Neural Network Self-Tuning Control for a Piezoelectric Actuator

Robust Adaptive Backstepping Control for Piezoelectric Nano-Manipulating Systems

Adaptive Output Feedback Control for Piezoactuator-driven Stage

Combined Control for a Piezoelectric Actuator Using a Feed-Forward Neural Network and Feedback Integral Fast Terminal Sliding Mode Control

Prandtl-Ishlinskii Model-Based Adaptive Feedforward Control for Piezoelectric-Stack-actuator-driven Systems

Adaptive Output Feedback Control with Feedback-Feedfoward Compensator for Piezoactuator-Driven Stages

Neural Network Based Inverse Control of Systems with Hysteresis

Inverse feedforward control of piezoelectric actuators using optimized composite neural network-based Hammerstein model

Adaptive Inverse Control for Piezoelectric Actuator with Dominant Hysteresis

Creep and Hysteresis Compensation for Nanomanipulation Using Atomic Force Microscope

A Direct Adaptive MNN Control Method for Stage Having Paired Reluctance Linear Actuator with Hysteresis

Modeling and control of piezoelectric actuator based on radial basis function neural network

Current-Cycle Iterative Learning Control for High-Precision Position Tracking of Piezoelectric Actuator System Via Active Disturbance Rejection Control for Hysteresis Compensation

£ 1 Adaptive Control Design for Hysteresis Compensation within Piezoelectric Actuators

Adaptive Robust Precision Motion Control of a Piezoelectric Positioning Stage

Adaptive Robust Repetitive Control of Piezoelectric Actuators

Modeling and Single Neuron Adaptive Pid Control of Flexible Piezoelectric Cantilever Beam