Precise micro motion platform based on shape memory material coarse motion driver

张斌,丁元柱,于月民

2012-09-29

Abstract:The invention discloses a precise micro motion platform based on a shape memory material coarse motion driver, belonging to a micro motion platform technology. A Y-directional coarse motion platform base, an X-directional coarse motion platform base, an X-directional coarse motion platform, an XY two-dimensional micro motion platform base, a Y-directional micro motion platform and an objective table are mounted on a base from bottom to top; the Y-directional micro motion platform is mounted in the X-directional micro motion platform through a Y-directional micro motion flexible articulated mechanism; the X-directional micro motion platform is mounted in the XY two-dimensional micro motion platform base through an X-directional micro motion flexible articulated mechanism and is driven by an X-directional piezoelectric micro motion driver and a Y-directional piezoelectric micro motion driver; and the X-directional coarse motion platform is matched with the X-directional coarse motion platform base through an X-directional coarse motion slide way and is driven by an X-directional shape memory material coarse motion driver and a Y-directional shape memory material coarse motion driver. The precise micro motion platform is simple and compact in structure, high in positioning precision and wide in application prospect and is easy to control.

Materials Science,Engineering