Abstract:Flexible capacitive tactile sensors show great promise in personalized healthcare monitoring and human-machine interfaces, but their practical application is normally hindered because they rarely possess the required comprehensive performance, that is, high pressure sensitivity and fast response within a broad pressure range, high structure robustness, performance consistency, etc. This paper aims to engineer flexible capacitive pressure sensors with highly ordered porous dielectric microstructures and a 3D-printing-based fully solution-processable fabrication process. The proposed dielectric layer with uniformly distributed interior microporous can not only increase its compressibility and dynamic response within an extended pressure range but also enlarge its contact area with electrodes, contributing to a simultaneous improvement in the sensitivity, response speed, detection range, and structure robustness. Meanwhile, owing to its superior abilities in complex structure manufacturing and dimension controlling, the proposed 3D-printing-based fabrication process enables the consistent fabrication of the porous microstructure and thus guarantees device consistency. As a result, the prepared pressure sensors exhibit a high sensitivity of 0.21 kPa-1, fast response and relaxation times of 112 and 152 ms, an interface bonding strength of more than 455.2 kPa, and excellent performance consistency (≤5.47% deviation among different batches of sensors) and tunability. Encouraged by this, the pressure sensor is further integrated with a wireless readout circuit and realizes wireless wearable monitoring of various biosignals (pulse waves and heart rate) and body movements (from slight finger touch to large knee bending). Finally, the influence law of the feature parameters of the porous microstructure on device performance is established by the finite element method, paving the way for sensor optimization. This study motivates the development of flexible capacitive pressure sensors toward practical application.

A highly sensitive, flexible capacitive pressure sensor based on strontium alginate with crater microstructure

Flexible capacitive pressure sensor array using acoustic-assisted fabrication of microstructures as surface and dielectric layers

Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics

High Sensitivity Flexible Capacitive Pressure Sensor Using Polydimethylsiloxane Elastomer Dielectric Layer Micro-Structured by 3-D Printed Mold

A New Strategy for the Fabrication of a Flexible and Highly Sensitive Capacitive Pressure Sensor

Arrayed porous polydimethylsiloxane/barium titanate microstructures for high-sensitivity flexible capacitive pressure sensors

A highly sensitive flexible capacitive pressure sensor with hierarchical pyramid micro-structured PDMS-based dielectric layer for health monitoring

A highly sensitive flexible capacitive pressure sensor with wide detection range based on bionic gradient microstructures

Flexible Pressure Sensor With High Sensitivity and Fast Response Based on Bionic Honeycomb-Structured Polydimethylsiloxane/Aluminum Oxide Composites Dielectric via 3-D Printing

Highly Sensitive and Flexible Capacitive Pressure Sensors Combined with Porous Structure and Hole Array Using Sacrificial Templates and Laser Ablation

Highly Sensitive and Flexible Capacitive Pressure Sensor Based on a Dual-Structured Nanofiber Membrane as the Dielectric for Attachable Wearable Electronics

Skin-Inspired Pressure Sensor with MXene/P(VDF-TrFE-CFE) as Active Layer for Wearable Electronics

Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception

Flexible Capacitive Pressure Sensor Based on a Double-Sided Microstructure Porous Dielectric Layer

A Novel Capacitive-Based Flexible Pressure Sensor Based On Stretchable Composite Electrodes And A Dielectric Elastomer With Microstructures

High sensitivity capacitive flexible pressure sensor based on PDMS double wrinkled microstructure

Flexible capacitive pressure sensor with sensitivity and linear measuring range enhanced based on porous composite of carbon conductive paste and polydimethylsiloxane

Design and Testing of Flexible Pressure and Temperature Sensing Capacitive Sensors

Sensitive, Robust, Wide-Range, and High-Consistency Capacitive Tactile Sensors with Ordered Porous Dielectric Microstructures

3D Dielectric Layer Enabled Highly Sensitive Capacitive Pressure Sensors for Wearable Electronics

Highly Reliable Sensitive Capacitive Tactile Sensor with Spontaneous Micron‐Pyramid Structures for Electronic Skins