Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception

Chunyu Lv,Chengcheng Tian,Jiashun Jiang,Yu Dang,Yang Liu,Xuexin Duan,Quanning Li,Xuejiao Chen,Mengying Xie

DOI: https://doi.org/10.1002/advs.202206807

IF: 15.1

2023-03-17

Advanced Science

Abstract:A capacitive tactile sensor based on a spontaneously wrinkled dielectric layer realizes ultrahigh sensitivity and linearity over a broad sensing range for physiological health monitoring. Furthermore, integrated with a multimaterial 3D‐printed soft pneumatic finger, the sensor achieves linear material hardness perception, and a tunable sensitivity to hardness is also obtained by controlling the inflation pressure of the finger. Ultrasensitive flexible pressure sensors with excellent linearity are essential for achieving tactile perception. Although microstructured dielectrics have endowed capacitive sensors with ultrahigh sensitivity, the compromise of sensitivity with increasing pressure is an issue yet to be resolved. Herein, a spontaneously wrinkled MWCNT/PDMS dielectric layer is proposed to realize the excellent sensitivity and linearity of capacitive sensors for tactile perception. The synergistic effect of a high dielectric constant and wrinkled microstructures enables the sensor to exhibit linearity up to 21 kPa with a sensitivity of 1.448 kPa−1 and a detection limit of 0.2 Pa. Owing to these merits, the sensor monitors subtle physiological signals such as various arterial pulses and respiration. This sensor is further integrated into a fully multimaterial 3D‐printed soft pneumatic finger to realize material hardness perception. Eight materials with different hardness values are successfully discriminated, and the capacitance of the sensor varies linearly (R2 > 0.975) with increasing hardness. Moreover, the sensitivity to the material hardness can be tuned by controlling the inflation pressure of the soft finger. As a proof of concept, the finger is used to discriminate pork fats with different hardness, paving the way for hardness discrimination in clinical palpation.

materials science, multidisciplinary,nanoscience & nanotechnology,chemistry

What problem does this paper attempt to address?

This paper aims to solve two major challenges faced by hypersensitive flexible pressure sensors in achieving tactile perception: the simultaneous realization of high sensitivity and excellent linearity. Although the existing micro - structured dielectric materials have endowed capacitive sensors with ultra - high sensitivity, the decline in sensitivity as pressure increases remains an unsolved problem. This article proposes a multi - walled carbon nanotube/polydimethylsiloxane (MWCNT/PDMS) dielectric layer with a self - wrinkled microstructure to achieve high sensitivity and good linearity in capacitive sensors for tactile perception. Through this design, the sensor exhibits excellent linearity (\(R^2 = 0.9982\)) in the pressure range from 0.005 to 21 kPa and a sensitivity as high as 1.448 kPa\(^{-1}\), with a detection limit as low as 0.2 Pa. In addition, this sensor can monitor subtle physiological signals, such as various arterial pulses and respiration, and can be integrated into a fully multi - material 3D - printed soft pneumatic finger to achieve perception of material hardness. By adjusting the inflation pressure of the soft finger, the sensitivity to material hardness can be adjusted. As a proof of concept, this finger was used to distinguish pork fats of different hardnesses, paving the way for hardness distinction in clinical palpation.