Abstract:Two-dimensional (2D) transition metal dichalcogenides (TMDs) have attracted attention as polymorphs depending on their phases (1T and 2H) when applying typical synthesis methods. The 2H phase is generally synthesised through chemical vapour deposition (CVD) on a wafer-scale at high temperatures, and many synthesis methods have been reported owing to their thermodynamic stability and semiconductor properties. By contrast, although the 1T phase is meta-stable with an octahedral coordination, thereby limiting the use of synthesis methods, the recent structural advantage in terms of the hydrogen evolution reaction (HER) has been emphasised. Despite this demand, no large-area thin-film synthesis method for 1T-TMDs has been developed. Among several strategies of synthesizing metallic-phase (1T) TMDs, chemical exfoliation (alkali metal intercalation) is a major strategy and others have been used for electron-beam irradiation, laser irradiation, defects, plasma hot electron transfer, and mechanical strain. Therefore, we suggest an innovative synthesis method using plasma-enhanced CVD (PECVD) for both the 1T and 2H phases of TMDs (MoS2 and WS2). Because ions and radicals are accelerated to the substrate within the sheath region, a high-temperature source is not needed for vapour ionisation, and thus the process temperature can be significantly lowered (150 °C). Moreover, a 4-inch wafer-scale of a thin film is an advantage and can be synthesised on arbitrary substrates (SiO2/Si wafer, glassy carbon electrode, Teflon, and polyimide). Furthermore, the PECVD method was applied to TMD-graphene heterostructure films with a graphene-transferred substrate, and for the first time, sequential metal seed layer depositions of W (1 nm) and Mo (1 nm) were sulfurized to MoS2-WS2 vertical heterostructures with Ar + H2S plasma. We considered the prospects and challenges of the new PECVD method in the development of practical applications in next-generation integrated electronics, HER catalysts, and flexible biosensors.

Scaling up Simultaneous Exfoliation and 2H to 1T Phase Transformation of MoS2

Preparation of Single-Layer MoS(2x)Se2(1-x) and Mo(x)W(1-x)S2 Nanosheets with High-Concentration Metallic 1T Phase.

Exfoliation of Bulk 2H-Mos 2 into Bilayer 1T-Phase Nanosheets Via Ether-Induced Superlattices

High Phase Purity of Large-Sized 1T'-Mos2 Monolayers with 2D Superconductivity.

High-metallic-phase-concentration Mo1–xWxS2 nanosheets with expanded interlayers as efficient electrocatalysts

Toward Scalable Electrochemical Exfoliation of Molybdenum Disulfide Powder through an Accessible Electrode Design

A Facile Space-Confined Solid-Phase Sulfurization Strategy for Growth of High-Quality Ultrathin Molybdenum Disulfide Single Crystals

Supercritical CO2‐Assisted Reverse‐Micelle‐Induced Solution‐Phase Fabrication of Two‐Dimensional Metallic 1t‐mos2 and 1T‐WS2

Electrochemically Exfoliating MoS 2 into Atomically Thin Planar‐Stacking Through a Selective Lateral Reaction Pathway

High phase-purity 1T′-MoS 2 - and 1T′-MoSe 2 -layered crystals

The first progress of plasma-based transition metal dichalcogenide synthesis: a stable 1T phase and promising applications

High phase-purity 1T′-MoS2- and 1T′-MoSe2-layered crystals

Rapid Wafer-Scale Growth of Polycrystalline 2H-MoS2 by Pulsed Metalorganic Chemical Vapor Deposition

Scalable and controllable synthesis of 2D high-proportion 1T-phase MoS2

General Bottom-Up Colloidal Synthesis of Nano-Monolayer Transition-Metal Dichalcogenides with High 1T′-Phase Purity

High-yield production of mono- or few-layer transition metal dichalcogenide nanosheets by an electrochemical lithium ion intercalation-based exfoliation method

Transformation of Monolayer MoS 2 into Multiphasic MoTe 2 : Chalcogen Atom-Exchange Synthesis Route

Antioxidant Triggered Metallic 1T' Phase Transformations of Chemically Exfoliated Tungsten Disulfide (WS2 ) Nanosheets

Facile Exfoliation for High-Quality Molybdenum Disulfide Nanoflakes and Relevant Field-Effect Transistors Developed With Thermal Treatment

Selective Preparation of 1T-and 2H-Phase MoS2 Nanosheets with Abundant Monolayer Structure and Their Applications in Energy Storage Devices

Synthesis and Characterization of Large Area Few-layer MoS2 and WS2 Films