Laser beam shaping using a photoinduced azopolymer droplet-based mask

R. Barille,A. Korbut,S. Zielinska,E. Ortyl,D. G. Perez

DOI: https://doi.org/10.1364/ao.510715

IF: 1.9

2024-01-24

Applied Optics

Abstract:R. Barille, A. Korbut, S. Zielinska, E. Ortyl, D. G. Perez The dewetting of an azopolymer droplet, followed by the photostructuration of the evaporated droplet, is employed to create an amplitude ... [Appl. Opt. 63, 990-998 (2024)]

optics

What problem does this paper attempt to address?

Laser Beam Shaping Using a Photoinduced Azopolymer Droplet-Based Mask

R. Barille,A. Korbut,S. Zielinska,E. Ortyl,D. G. Perez

DOI: https://doi.org/10.1364/AO.510715

2024-02-08

Abstract:The dewetting of an azopolymer droplet, followed by the photostructuration of the evaporated droplet, is employed to create an amplitude mask. This straightforward process yields a large area featuring periodic micro- and nanostructures. The resulting pattern is utilized to generate a nondiffracting beam. Starting with a Gaussian beam illuminating the amplitude mask, the critical aspect is the production of a bright, ring-shaped beam with a high radius-to-width ratio and symmetric central laser spots, each with the same intensity. This alternative approach to shaping a laser beam is demonstrated as a rapid and cost-effective fabrication technique.

Optics
Beyond 100 nm Resolution in 3D Laser Lithography: Post Processing Solutions

G. Seniutinas,A. Weber,C. Padeste,I. Sakellari,M. Farsari,C. David

DOI: https://doi.org/10.48550/arXiv.1807.08462

2018-07-23

Abstract:Laser polymerization has emerged as a direct writing technique allowing the fabrication of complex 3D structures with microscale resolution. The technique provides rapid prototyping capabilities for a broad range of applications, but to meet the growing interest in 3D nanoscale structures the resolution limits need to be pushed beyond the 100 nm benchmark, which is challenging in practical implementations. As a possible path towards this goal, a post processing of laser polymerized structures is presented. Precise control of the cross-sectional dimensions of structural elements as well as tuning of an overall size of the entire 3D structure was achieved by combining isotropic plasma etching and pyrolysis. The smallest obtainable feature sizes are mostly limited by the mechanical properties of the polymerized resist and the geometry of 3D structure. Thus the demonstrated post processing steps open new avenues to explore free form 3D structures at the nanoscale.

Applied Physics
A Low Diffraction Laser Beam As Applied to Polymer Ablation

XH Lu,YL Yao,K Chen

DOI: https://doi.org/10.2351/1.1405852

IF: 2.1

2001-01-01

Journal of Laser Applications

Abstract:A low diffraction beam is obtained by altering the existing resonator of a CO2 laser using a special phase plate. The phase plate is designed based on the boundary diffraction principle and is implemented on the resonator rear mirror. It is found that the low diffraction beam has a smaller M2 value than that of a Gaussian beam. The effects of the improved beam quality on a laser ablation process are investigated using a polymeric material. A theoretical model is provided to predict the laser ablated hole profile and penetration depth. The theoretical results are in agreement with the experimental measurements. Both the experimental and theoretical results show that the low diffraction beam has marked advantages over the Gaussian beam in ablation-dominated material removal processes in terms of larger depth and smaller taper at the same average power level.
Two-photon patterning of a polymer containing Y-shaped azochromophores

A. Ambrosio,E. Orabona,P. Maddalena,A. Camposeo,M. Polo,A. A. R. Neves,D. Pisignano,A. Carella,F. Borbone,A. Roviello

DOI: https://doi.org/10.1063/1.3058820

IF: 4

2009-01-05

Applied Physics Letters

Abstract:We report on the patterning of the free surface of azo-based polymer films by means of mass migration driven by one- or two-photon absorption. A symmetric donor-acceptor-donor structured Y-shaped azochromophore is specifically synthesized to enhance two-photon absorption in the polymer. The exposure of the polymer film to a focused laser beam results in light-driven mass migration for both one- and two-photon absorptions. Features with subdiffraction resolution (250 nm) are realized and the patterning dynamics is investigated as a function of the light dose. Furthermore, functional photonic structures, such as diffraction gratings with periods ranging between 0.5 and 2.0 μm, have been realized.

physics, applied
Structured polarized laser beams for controlled spiral-shaped mass transfer in azopolymer thin films

Alexey Porfirev,Svetlana Khonina,Denis Porfiriev,Nikolay Ivliev

DOI: https://doi.org/10.1364/ao.521196

IF: 1.9

2024-05-03

Applied Optics

Abstract:Alexey Porfirev, Svetlana Khonina, Denis Porfirev, Nikolay Ivliev We present an approach for the realization of controlled spiral-shaped mass transfer in azopolymer thin films and the fabrication of spiral ... [Appl. Opt. 63, 3779-3784 (2024)]

optics
Diffractive Devices Fabricated on Azobenezene Polymer by Polarization Laser Direct-Writing

Peng Hao,Shiyuan Duan,Zhaolou Cao,Shuo Wu,Keyi Wang,Peizheng Yan

DOI: https://doi.org/10.1117/12.975109

2012-01-01

Abstract:Polarization laser direct-writing system was designed and the recording and research using the azobenzence polymer film on the system was investigated. Only single laser beam was used, and move the laser focal spot on the sample film pointto- point. By composite control of the optical power density, polarization direction and exposure time of the inscribing laser, a special phase-delay distribution graph which have different etching depth in different point can be achieved. Diffractive devices, such as grating and zone plate, have been inscribed. The anisotropy and surface topography was measured by polarizing optical microscopy (POM) and profilometer. Some qualitative analysis was made. Using the red light which is insensitivity to the azo polymer film, the diffractive devices' focal spots were collected by CCD. Compared with the holographic interference method, the method is more flexible, undemanding for the experimental environment and any two-dimension distribution graph can be written in theory. It may get extensive application.
Photoinduced Microstructures Inside Bulk Azodye-Doped Polymers by the Coherent Field of a Femtosecond Laser

JH Si,JR Qiu,K Hirao

DOI: https://doi.org/10.1117/12.516961

IF: 4

2002-01-01

Applied Physics Letters

Abstract:Two kinds of photoinduced periodic microstructures in azodye-doped polymethylmethacrylate were fabricated by interference of two coherent beams of a nonresonant femtosecond laser. One is volume holographic gratings induced by interference of two fs-laser beams with same frequency; the other is molecular polar orientation induced by dual-frequency coherent fs-laser excitation at fundamental and second harmonic frequencies. The photoinduced holographic gratings consist of two surface relief gratings and refractive index modulated gratings in the interior of the polymers. Diffraction efficiency up to 90% of the first-order Bragg for the gratings was obtained. For the photoinduced molecular polar orientation, three kinds of noncentrosymmetries of the polymer films were optically tailored using appropriate combinations of the writing beam polarizations.
Photoablative Etching of Polymers for Integrated Optoelectronic Devices

P LEMOINE,JD MAGAN,W BLAU

DOI: https://doi.org/10.1016/0167-9317(91)90130-6

IF: 2.3

1991-01-01

Microelectronic Engineering

Abstract:Laser photoablation of a variety of organic polymer films was observed at wavelengths of 193nm, 248nm and 532nm. Polydiacetylenes showed a very high intensity dependence of the etch rate. No degradation was observed in the remaining layers of the film except for visible (532nm) irradiation. Polystyrene films showed a high sensitivity of the ablation characteristics on dye doping. For the example of a polycarbonate film we fitted the ablation data to a model adapted from Magan et al. [1].
Light driving force for surface patterning on azobenzene-containing polymers.

Jintang Huang,Stefan Beckemper,Si Wu,Jing Shen,Qijin Zhang,Keyi Wang,Arnold Gillner

DOI: https://doi.org/10.1039/c1cp21098j

IF: 3.3

2011-01-01

Physical Chemistry Chemical Physics

Abstract:In this paper, we investigated the effect of light driving force induced surface deformation on azobenzene-containing polymers. The surface deformation is attributed to light-induced mass migration inside the polymers. Circular cap arrays are firstly fabricated by high power laser ablation via polarization controlled three-beam interference. The circular caps are subsequently exposed to polarization controlled two-beam interfering field. The results illuminate that when the interfering laser beams are both set to P polarization, the circular caps are deformed. While the laser beams are of other interfering modes like (S, S) and (+45 degrees, -45 degrees), the caps are seldom deformed. The circular caps are also exposed to single intensity-homogeneous linearly polarized laser beam. The deformation of the caps keeps the same direction as the irradiating polarization. A model based on the focusing effect of the circular caps is addressed to explain the origin of the light driving force for mass migration in azopolymers. The all-optical approach for the production of deformed caps can be used to generate aspherical lens, which may be applied to many domains.
Two-Photon Polymerization of Cylinder Microstructures by Femtosecond Bessel Beams

Liang Yang,Ayman El-Tamer,Ulf Hinze,Jiawen Li,Yanlei Hu,Wenhao Huang,Jiaru Chu,Boris N. Chichkov

DOI: https://doi.org/10.1063/1.4891841

IF: 4

2014-01-01

Applied Physics Letters

Abstract:In this work, we present an approach to modulate femtosecond laser beams into Bessel beams with a spatial light modulator (SLM) for two-photon polymerization applications. Bessel beams with different parameters are generated and annular optical fields are produced at the focal plane of the objective. Uniform cylinder microstructures are fabricated by a single illumination during a few seconds without stage translation. By modulating the holograms encoded on the SLM, the diameters of the fabricated annular structures can be flexibly controlled in a wide range with no need of changing the optical elements and realignment of the optical path.
Ultrafast Large Area Micropattern Generation in Non-absorbing Polymer Thin-Films by Pulsed Laser Diffraction

Ankur Verma,Ashutosh Sharma,Giridhar U. Kulkarni

DOI: https://doi.org/10.48550/arXiv.1101.5283

2011-01-27

Soft Condensed Matter

Abstract:We report an ultrafast, parallel and beyond-the-master micro-patterning technique for ultrathin (30 nm-400 nm) non-absorbing polymer films by diffraction of a laser light through a two dimensional periodic aperture. The redistribution of laser energy absorbed by the substrate causes self-organization of polymer thin-film in the form of wrinkle like surface relief structures caused by localized melting and freezing of the thin-film. Unlike the conventional laser ablation and laser writing processes, low laser fluence is employed to only passively swell the polymer as a pre-ablative process without the loss of material, and without absorption/reaction with the incident radiation. Self-organization in the thin polymer film aided by the diffraction pattern produces micro-structures made up of thin raised lines. These regular microstructures have far more complex morphologies than the mask geometry and very narrow line widths that can be an order of magnitude smaller than the openings in the mask. The microstructure morphology is easily modulated by changing the film thickness, aperture size and geometry and by changing the diffraction pattern, e.g., by changing the aperture-substrate distance.
Azo Polymer Microspheres with Photo‐Manipulated Surface and Topographic Structure

Xinran Zhou,Yi Du,Xiaogong Wang

DOI: https://doi.org/10.1002/macp.201500435

IF: 2.996

2015-01-01

Macromolecular Chemistry and Physics

Abstract:A methacrylate‐based copolymer containing side‐chain push–pull azo chromophores and adamantyl groups is synthesized and characterized by 1H NMR, DSC, thermal gravimetric analysis, gel permeation chromatography, and UV–vis. By exploiting its good solubility in a water‐immiscible solvent (dichloromethane), azo polymer microspheres are fabricated through the solution dispersion method. Surface relief structures are inscribed on the microsphere surfaces upon exposure to the interference pattern of laser beams at 532 nm. Meanwhile, the shape of the microspheres is stable upon the light irradiation, which is distinct from the submicron‐scale colloidal spheres of azo polymers. By using camphene as a porogen, microspheres with the well‐developed porous structures are prepared. For the first time, it is observed that pores on the azo polymer microspheres can be modified or even selectively closed upon irradiation with a linearly polarized laser beam. image
Near-field optical control of doughnut-shaped nanostructures

A.M. Dubrovkin,R. Barillé,E. Ortyl,S. Zielinska

DOI: https://doi.org/10.1016/j.optcom.2014.08.027

IF: 2.4

2015-01-01

Optics Communications

Abstract:The application of a local near-field optical excitation with a control of the illumination time can be used to manage step-by-step the reshape of individual doughnut-shaped azopolymer nano-objects demonstrating their performances as a promising functional nano-objects. The possibility to provide a photoinduced reshaping opens a way to the fundamental study of size-dependent scaling laws of optical properties, photoinduced reshaping efficiency and possible nanoreactor or nanoresonator behaviors at nanometer scales. As an example the created nano-object is used to self-assembly polystyrene nanospheres in a supraball.

optics
Surface patterns induced by laser irradiation on thin polymer bilayer films

Yan Zhao,Mei Li,Qinghua Lu

DOI: https://doi.org/10.1016/j.colsurfa.2007.06.025

2008-01-01

Abstract:We report on the preparation of wavelike surface patterns with characteristic wavelengths on thin bilayers of poly(methyl methacrylate) on azobenzene liquid crystalline polymer films (LCP/PMMA) by irradiation of a single polarized pulsed laser beam. The formation of such patterns was influenced by the thickness of the upper layer and the laser fluence. We were also able to guide the wavelike pattern to have a specific orientation by placing an elastic polydimethylsiloxane (PDMS) mold on the surface of bilayer film prior to laser irradiation. Moreover, the property of the laser irradiation, that is, the selectivity through mask-projection systems, allowed us fabricating complicated micropatterns for novel microdevices.
Laser Diode Beam Shaping and Homogenization with a Multimode Fiber applied to Optical Resolution Photoacoustic Microscopy based on Linear Phased Array Ultrasound Probe

J. Benlloch,J. J. García-Garrigós,F. Camarena,N. Jiménez,A. Cebrecos,Javier A. Navarro-Calvo

DOI: https://doi.org/10.1109/IUS54386.2022.9957264

2022-10-10

IUS

Abstract:Pulsed Laser diodes stacks (PLD) are a promising low cost option as laser sources for Optical Resolution Photo acoustic Microscopes (ORPAM). Nevertheless, their multimode beams with wide divergences and non-uniform light distributions, imposes limitations to the lateral resolution that can be achieved at a long laser focusing distance needed for clinical applications. Here, it is devised a new strategy to attain high lateral resolutions at a centimeter-long working distance, based on coupling the PLD power into a square core multimode optical fiber. An ORPAM system with an ultrasound linear phased-array in reflection confocal mode was built to test its performance.

Physics,Engineering,Medicine
Absorption Modulation Enhancement of Azo-polymer Film Induced by Plasmonic Field

Xiangxian Wang,Douguo Zhang,Qiang Fu,Hai Ming,Wenxuan Wu,Qijin Zhang

DOI: https://doi.org/10.1117/12.999639

2012-01-01

Abstract:A thin photochromic film on top of the resist layer can be used as a virtual mask to fabricate super-resolution lithography patterns. In this letter, based on the azobenzene polymer, the absorption intensity of the 365nm LED is effectively modulated by 532nm laser, the modulation degree reaches to 87%. When the silver nanocubes are dropped onto the surface of the polymer film, the modulation degree is significantly higher than that without the nanoparticles in the same intensity of 532nm laser due to the field enhancement of excitation of surface plasmons. The absorption modulation features of the polymer film are favorable for the further smaller line width nanolithography.
Micro- and Nanofabrication Using Bessel-beam Activated Photopolymerization

He Cheng,Chun Xia,Mingman Sun,Meng Zhang,Stephen M. Kuebler,Xiaoming Yu

DOI: https://doi.org/10.2351/7.0000079

IF: 2.1

2020-01-01

Journal of Laser Applications

Abstract:Microfabrication based on photopolymerization is typically achieved by scanning a focal spot within the material point by point, which significantly limits the fabrication speed. In our previous study, the authors explored a method for rapid fabrication of high-aspect-ratio micro- and nanostructures by scanning the Bessel beam in the plane transverse to the direction of beam propagation. However, the structure fabricated by this method suffers from the surface texture. In this work, the origin of these effects is investigated by the in situ measurement of the photopolymerization process. By scanning the laser beam at a speed faster than the polymerization that takes place at any given position, we show that it is possible to eliminate the surface texture and obtain smooth surface finish.
Active Control of Surface Plasmon Polaritons by Optical Isomerization of an Azobenzene Polymer Film

D. G. Zhang,X.-C. Yuan,A. Bouhelier,G. H. Yuan,P. Wang,H. Ming

DOI: https://doi.org/10.1063/1.3225156

IF: 4

2009-01-01

Applied Physics Letters

Abstract:Active control of surface plasmon polaritons (SPPs) by optical isomerization of an azobenzene polymer film is proposed and demonstrated in this letter. A tightly focused 532 nm laser beam was used to change the wave number of the SPPs and a separate unpolarized light source was employed to erase the change, forming one cycle of the control. The largest change of the SPPs wave number obtained in the experiments is about 0.0382K0 in the case of 54 nm thickness azo-polymer film. Validity of this method is confirmed by consistence between theoretical and experimental results.
Ion Incidence Angle Dependent Pattern Formation at AZ 4562® Photo Resist by Ar+ Ion Beam Erosion

Tom Ruediger,Martin Mitzschke,Andrea Prager,Ying Liu,Bernd Abel,Agnes Schulze,Frank Frost

DOI: https://doi.org/10.1016/j.apsusc.2021.151682

IF: 6.7

2022-01-01

Applied Surface Science

Abstract:Interactions between ion beams and polymers have great potential to tailor the properties of the polymer surface by modifying the morphology as well as the chemical composition. The application of a wide range of ion incidence angles (0 degrees - 75 degrees) for the erosion of the commercially available photoresist AZ 4562 (R) revealed a multitude of nanopatterns as investigations using atomic force microscopy and scanning electron microscopy have shown. A sequence of angle-dependent patterns (nanoholes, ripples, facets) can be observed, which are already known from inorganic materials. Additionally, the variation of the erosion time (5 min - 60 min) showed an evolution of the nanopatterns. A changed composition of the polymer surface could be detected by means of X-ray photoelectron spectroscopy.
Coherent quantum control of two-photon absorption and polymerization by shaped ultrashort laser pulses

jing ma,wenjing cheng,shian zhang,donghai feng,tianqing jia,zhenrong sun,jianrong qiu

DOI: https://doi.org/10.1088/1612-2011/10/8/085304

IF: 1.704

2013-01-01

Laser Physics Letters

Abstract:The polymerization and feature size in micro/nanofabrication are usually controlled by changing the femtosecond laser pulse energy and irradiation pulse number. In this paper, we present the coherent control of two-photon absorption (TPA) and polymerization in a polymer with a isopropyl thioxanthone (ITX) photoinitiator by modulating the phase of 800 nm femtosecond laser pulses. We demonstrate experimentally and theoretically that the TPA probability and polymerization can be efficiently controlled by shaped ultrashort laser pulses. By using this method, the volume of a fabricated microrod decreases to 1/125 of that induced by Fourier transform limit laser pulses, and it is less than 1/25 of the diffraction limit.

Laser beam shaping using a photoinduced azopolymer droplet-based mask

Laser Beam Shaping Using a Photoinduced Azopolymer Droplet-Based Mask

Beyond 100 nm Resolution in 3D Laser Lithography: Post Processing Solutions

A Low Diffraction Laser Beam As Applied to Polymer Ablation

Two-photon patterning of a polymer containing Y-shaped azochromophores

Structured polarized laser beams for controlled spiral-shaped mass transfer in azopolymer thin films

Diffractive Devices Fabricated on Azobenezene Polymer by Polarization Laser Direct-Writing

Photoinduced Microstructures Inside Bulk Azodye-Doped Polymers by the Coherent Field of a Femtosecond Laser

Photoablative Etching of Polymers for Integrated Optoelectronic Devices

Light driving force for surface patterning on azobenzene-containing polymers.

Two-Photon Polymerization of Cylinder Microstructures by Femtosecond Bessel Beams

Ultrafast Large Area Micropattern Generation in Non-absorbing Polymer Thin-Films by Pulsed Laser Diffraction

Azo Polymer Microspheres with Photo‐Manipulated Surface and Topographic Structure

Near-field optical control of doughnut-shaped nanostructures

Surface patterns induced by laser irradiation on thin polymer bilayer films

Laser Diode Beam Shaping and Homogenization with a Multimode Fiber applied to Optical Resolution Photoacoustic Microscopy based on Linear Phased Array Ultrasound Probe

Absorption Modulation Enhancement of Azo-polymer Film Induced by Plasmonic Field

Micro- and Nanofabrication Using Bessel-beam Activated Photopolymerization

Active Control of Surface Plasmon Polaritons by Optical Isomerization of an Azobenzene Polymer Film

Ion Incidence Angle Dependent Pattern Formation at AZ 4562® Photo Resist by Ar+ Ion Beam Erosion

Coherent quantum control of two-photon absorption and polymerization by shaped ultrashort laser pulses