Imaging Extreme Ultraviolet Radiation Using Nanodiamonds with Nitrogen-Vacancy Centers

Teng-I Yang,Yuen Yung Hui,Jen-Iu Lo,Yu-Wen Huang,Yin-Yu Lee,Bing-Ming Cheng,Huan-Cheng Chang
DOI: https://doi.org/10.1021/acs.nanolett.3c02472
IF: 10.8
2023-09-16
Nano Letters
Abstract:Extreme ultraviolet (EUV) radiation with wavelengths of 10-121 nm has drawn considerable attention recently for its use in photolithography to fabricate nanoelectronic chips. This study demonstrates, for the first time, fluorescent nanodiamonds (FNDs) with nitrogen-vacancy (NV) centers as scintillators to image and characterize EUV radiations. The FNDs employed are ∼100 nm in size; they form a uniform and stable thin film on an indium-tin-oxide-coated slide by electrospray deposition. The film...
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology
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