A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches

M. Bedani,F. Carozza,R. Gaddi,A. Gnudi,B. Margesin,F. Giacomozzi
DOI: https://doi.org/10.48550/arXiv.0802.3088
2008-02-21
Other Computer Science
Abstract:We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulator-metal (MIM) capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate. The presented circuit is well-suited for all applications requiring adaptive impedance matching between two in principle unknown cascaded RF-circuits. The fabrication and testing of a monolithic integrated prototype in RF-MEMS technology from ITC-irst is currently underway.
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