Mathematical and Computer Modeling of the Spreading Resistance Value of the Metal-semiconductor Contact

V. Ziyautdinov,V. Filippov,S. Mitsuk
DOI: https://doi.org/10.1109/SUMMA53307.2021.9632081
2021-11-10
Abstract:The technique to identify transition resistance of metal-semiconductor contact by results of spreading resistance measurement is suggested in the article. The solved electrodynamics boundary problem serves a theoretical justification of the technique. The paper represents the results of theoretic calculations of contact spreading resistance in case the contacts are of small area. The correlation between the size of under-contact area and spreading resistance value has been estimated. The calculation formulae are given in the form which are convenient for practical usage. Modelling of electrical field in the semiconductor area has been done. The suggested technique has been practically tested while measuring resistance of nickel contact on silicon. The suggested technique can be used for various ohmic contact, as the obtained expressions do not imply any concrete structure of metal-conductor.
Computer Science,Engineering,Mathematics,Physics
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