The effects of contact size and non-zero metal resistance on the determination of specific contact resistance

Gregory S. Marlow,Mukunda B. Das

DOI: https://doi.org/10.1016/0038-1101(82)90036-3

1982-02-01

Abstract:This paper presents theoretical and experimental results concerning two sources of error in the determination of specific contact resistance of ohmic contacts to semiconductor device structures that utilize circular test patterns with varying gap length. It is shown that the potential drop vs gap length data cannot be usually represented by a straight line and a non-zero metal overlay sheet resistance can significantly alter the effective contact resistance value.

physics, condensed matter, applied,engineering, electrical & electronic