High-sensitivity and low-volume-based piezoelectric MEMS acceleration sensor using PiezoMUMPs

Priyabrata Biswal,Mithlesh Kumar,Sougata Kumar Kar,Banibrata Mukherjee

DOI: https://doi.org/10.1007/s10854-023-11528-x

2023-11-01

Abstract:The piezoelectric-based accelerometer gains popularity due to its capability to produce direct electrical output. In this work, two new meander architecture-based high-performance piezoelectric accelerometers have been proposed and their performance characteristics are extensively analyzed. The meander-based accelerometers are designed using PiezoMUMPs fabrication technology which uses 0.5 μ$$\mu$$m AlN piezo layer. The designed structures are having overall area of 1.08 mm×$$\times$$ 1.8 mm and 1.96 mm×$$\times$$ 1.8 mm with voltage sensitivity of 3.92 V/g and 1.8 V/g, respectively, in resonant region. The proposed meander architecture utilizes low volume and exhibits improved dynamic characteristics in terms of higher voltage sensitivity, lower-resonant frequencies, and better structural stability with respect to reported literature. Further, the energy-harvesting aspects for these meander-based structures have been explored, and the harvested power of the proposed structure is higher than the conventional structure.

engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied