Design, Modeling and Parametric Analysis of Piezoelectric Energy Scavenger on Silicon Substrate as a Vibration Sensor

Namrata Saxena,Varshali Sharma,Ritu Sharma,Kamlesh Kumar Sharma,Kapil Kumar Jain
DOI: https://doi.org/10.1007/s12633-021-01298-8
IF: 3.4
2021-08-04
Silicon
Abstract:The work presented in this article is based on the performance evaluation of the piezoelectric energy scavenger (PES) for vibration sensing applications. For this the two structures i.e., Pyramidal Seismic-Mass Rectangular Two Beam (PSMR2B) and Four Beam (PSMR4B) are designed. In both the structures the conventional square shaped seismic mass is modified to the pyramid shape to resolve the constraints on fabricating the square shaped seismic mass using anisotropic etching as its etch rate is different among all the crystal planes. The operation of the energy scavengers is evaluated on account of the parametric variation of displacement, von Mises stress, electric potential and energy parameters with 1g (g = 9.8m/s2) to 5g input acceleration. The resonance frequency of the PSMR2B and PSMR4B energy scavengers is found to be 595.35Hz and 834.14Hz respectively with the structure volume as 3.995 × 109μm3. At 5g input acceleration, the structures generate the voltage of 848.24 mV and 864 mV and total electric energy of 36.32 pJ and 38.16 pJ with the von Mises stress of 2.23 × 106N/m2 and 1.15 × 106N/m2 respectively for PSMR2B and PSMR4B ambient energy harvesters. These configurations can be implemented as an energy harvester for several wireless sensing applications like ambient mechanical vibration sensing, tyre pressure sensors and also as a shoe insert for defence application.
materials science, multidisciplinary,chemistry, physical
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