High coupling coefficient Temperature compensated FBAR resonator for oscillator application with wide pulling range

Y. Oshmyansky,D. Lee,R. Ruby,S. Ortiz,F. Bi,Q. Zou,M. Small,J. Kaitila
DOI: https://doi.org/10.1109/FREQ.2010.5556250
2010-06-01
Abstract:This paper demonstrates two variations of Temperature compensated (TempCo) FBAR resonators with high Kt<sup>2</sup>. One 1.5 GHz non-symmetric stack design TempCo FBAR resonator has a Kt<sup>2</sup> of 4.28% and linear TCF of 0 ppm/°C. A second, quasi-symmetric stack design 1.5GHz TempCo FBAR resonator has Kt<sup>2</sup> as high as 5.6% and linear TCF of −6 ppm/°C. Significant Kt<sup>2</sup> improvement comes from optimal design of stack film, interposer electrode effect and novel process development of a sealant for the oxide to protect it from HF etching. This paper also discusses the trade-off between two parameters (linear TCF vs. Kt<sup>2</sup>). High Kt<sup>2</sup> TempCo FBAR resonator is ideal for FBAR oscillator application with wide frequency pulling range.
Engineering,Physics,Materials Science
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